The U-523 micropositioning systems from Physik-Instrumente are low-profile, high-accuracy translation stages with linear encoders. The U-523 stage is next-larger in the series of ultrasonic piezomotor-driven stages of which the U-521 is the smallest. For improved guiding accuracy, the U-523 uses two crossed roller bearings mounted on ground aluminum profiles. The integrated PILine® linear motor can generate closed-loop velocities to 200 mm/s over a 22 mm travel range. An integrated XY stage based on the U-523 is available as the U-723.
Features
Features of the U-523 micropositioning systems include:
- Travel Range 22 mm
- Max. Velocity 200 mm/s
- Ultra-Low Profile
- Direct Metrology Linear Encoder with 0.01 µm Resolution
- High Guiding Accuracy with Crossed Roller Bearings
- Piezo Linear Motor
- Self Locking at Rest
- Advantages of PILine® Micropositioning Systems
The ultrasonic piezoceramic drives used in PILine® micropositioners have a number of advantages over classical drives:
- Higher Accelerations, up to 5 g
- Speeds up to 500 mm/s
- Small Form Factor
- Self-Locking When Powered Down
- No Shafts, Gears or Other Rotating Parts
- Non-Magnetic and Vacuum-Compatible Drive Principle
- Application Examples
U-523 micropositioning systems are suitable for use is:
- Biotechnology
- Micromanipulation
- Microscopy
- Quality assurance testing
- Metrology
- Mass storage device testing
- R&D
- Photonics packaging