The Evactron® 25 De-Contaminator can be used to remove atmospheric hydrocarbons and carbon contamination from SEMs, FIBs, and other vacuum chambers. The Evactron® 25 De-Contaminator makes use of a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber, eliminating contamination. A simple button push enables the VentDetect™ Evactron Cleaning start process.
Key Features
The key features of the Evactron® Model 25 RF Plasma Decontaminator are:
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Remove unwanted carbon contamination from your instrument
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Easy setup and operation
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Can be used on nearly all makes and models of electron microscopes
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KF 40 vacuum mounting &ange, adapter &anges available
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Wide Pressure Range
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Free 5 year limited warranty
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Start cleaning by using chamber vent and evacuation controls
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Preset pressure, power and time settings from front panel or computer interface
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Just use air for oxygen radicals, or use other gases for alternative plasma processes
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Advanced plasma detection logic
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Cleaning and error logs record use history and aid troubleshooting