PUMA Darkfield Patterned Wafer Inspectors from KLA Tencor

This video shows the PUMA family of laser imaging, darkfield patterned wafer inspectors from KLA Tencor. The high-speed wafer inspectors are highly sensitive, and have unique optical modes as well as multiple pixel options.

These laser-based optical inspection systems effectively disposition wafers and enhance the predictability of the chipmaking process by obtaining crucial defects at high production throughputs.

Run Time - 1:14min

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