KlearPoint Real-Time Tool Monitoring System from KLA Tencor
This video illustrates a unique service model called KlearPoint, which utilizes KLA Tencor experts to manage tool performance using real-time tool monitoring. KlearPoint can be included in service agreements to enhance tool performance and productivity for global customers.
The objective of KlearPoint is to maximize overall equipment effectiveness (OEE) by reducing lost-time due to interrupts, increasing uptime and recipe success, and enabling a more preventive and predictive service model.
Run Time - 2:38min