Tegal Corporation, a leading designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits, MEMS, and nanotechnology devices, today announced that it has shipped an additional 901ACS unit to a leading opto-semiconductor / LED manufacturer to support capacity expansion for lighting and optical sensor device production. The new Tegal 901ACS system adds to the customer’s existing installed base of 900 Series etch systems.
Murali Narasimhan, Vice President – Marketing of Tegal Corporation, said: “High Brightness LEDs are widely recognized as being innovative light sources compatible with the green future, offering the important energy conservation benefits of low power consumption and low thermal output. Additionally, the compact dimensions of HB-LEDs, and their form-factor flexibility, opens the door to making aesthetic improvements for lighting in automotive, aeronautical, commercial, and home environments. This follow-on shipment for the 901ACS production tool shows our customer’s high degree of satisfaction with the workhorse Tegal 900 Series production etchers. These tools offer the lowest cost of ownership for many etch applications in the highly cost sensitive area of IC production for consumer electronics.”
The Tegal 901ACS is the latest in a series of diode plasma etch systems produced by Tegal, the industry pioneer in commercial single-wafer plasma etching. Over 1,500 systems in the 900 Series have been shipped to date, providing reliable and cost-effective support for a wide range of plasma etch processes. The Tegal 900ACS Series is optimized for pad, zero layer, non-selective nitride, backside, and planarization etching, as well as for oxide, nitride, poly, and compound materials applications for HB-LED, MEMS, and Optoelectronic device fabrication. The 900ACS Series platform incorporates a production-proven transport system that can accommodate 75 mm to 200 mm round, square or rectangular substrates.
Also of note, the Advanced Control System (ACS) upgrade is available exclusively from Tegal as a field or factory retrofit for the existing installed base of 900 and 980 series systems. The ACS features a fully integrated graphical user interface, parametric data logging, full factory automation support, and throughput enhancements for the wafer-handling system.