Park Systems Inc., world-leading manufacturer of Atomic Force Microscopes (AFM) is announcing Park NX-TSH, automated Tip Scan Head for large sample analysis over 300 mm. Park NX-TSH is for large and heavy sample flat panel display glass and features conductive AFM for electric defect analysis by integrating a micro probe station.
Park Systems will present Park NX-TSH at Semicon China June 27-29 in their booth E7549 at the Shanghai New International Expo Centre and at their virtual display at Semicon West.
The Tip Scanning Head (TSH) is an automated moving tip head for industrial AFM measurements on large samples over 300 mm developed for OLED, LCD, Photonics for large sample analysis. The automated Tip Scan Head moves on an air-bearing stage technology and combines the x, y, z scanners moving directly to the desired point on the substrate.
Park NX-TSH was developed specifically for manufacturers setting up fabs to produce next-generation flat panel displays with the objective to overcome the 300mm size threshold limit. Using conductive AFM, Park NX-TSH measures the sample surface with an optional probe station that contacts the sample surface and provides current into small devices or chips.
Keibock Lee, President, Park Systems
As the demand for larger flat panel displays increases to 65”, 75” and more, the automated Park NX-TSH system overcomes nano metrology challenges with a gantry style tip scanner system that moves directly to a place on the sample and produces high resolution images of the roughness measurement, step height measurement, critical dimension and sidewall measurements.
Park NX-TSH can scan tip in x, y and z directions, up to 100 µm x 100 μm (x-y direction) and 15 μm z direction, and has a flexible chuck to accommodate large and heavy samples.
Park Systems has scaled up their AFM tools for Gen10+ and all large flat panel displays using Park NX-TSH (Tip Scanning Head) system, and is the only automated Tip Scan Head for large sample analysis over 300 mm.
Keibock Lee, President, Park Systems
The sample is fixed on a sample chuck and the tip scanning head attached to the gantry moves to measurement positions on the surface sample. The Park NX-TSH tip scanning head system overcomes the limitations of sample size and weight since the sample is fixed on the sample chuck.
Atomic force microscopy is the most accurate, and non-destructive, method of measuring samples at nanoscale and with Park NX-TSH, reliable, high resolution AFM images can be obtained on OLEDs, LCDs, photomasks, and more, in a gantry style bridge system improving productivity and quality.
Visit the Park Systems Booth at Semicon China or their Virtual Booth at Semicon West to learn more about Park NX-TSH and see the Park NX-TSH video at parksystems.com/tsh/video.