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Results 101 - 102 of 102 for Aluminium nitride
  • Article - 18 Jun 2007
    While Microelectromechanical Systems (MEMS) have come into existence only in the last decade, they have application in almost all areas of science. Microcantilevers are the most basic form on MEMS....
  • Article - 4 May 2013
    Process conditions have a considerable impact on material properties that are produced with the help of ALD/CVD, the right selection of precursors is very important in order to obtain the desired...