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Results 1 - 2 of 2 for OCD Calibration
  • Park Systems
    Supplier Profile
    Park Systems Corporation is the world’s leading manufacturer of atomic force microscopy systems for scientific research, nanoscale engineering, semiconductor fabrication and quality assurance....
  • High Throughput-High Resolution Sidewall Imaging Using 3D AFM
    Article - 26 Mar 2012
    Height measurement by AFM is crucial in metrology, however it would also benefit from the capability to perform sidewall roughness imaging.