Posted in | News | Nanoanalysis

Integration of Magma's CAD-Based Analysis Technology with Applied's Advanced Inspection Systems

Applied Materials, Inc. and Magma Design Automation, Inc. announced today that they have integrated Magma's CAD (computer-aided design)-based navigation and yield analysis software with Applied's advanced inspection systems.

This unique combination of design and manufacturing tools has accelerated lithography qualification and improved chip yields at multiple customers for the development and production of advanced technology nodes.

"The introduction of CAD-based inspection technology for defect analysis and monitoring at GLOBALFOUNDRIES Fab 1 has helped improve defect management efficiency and reduce cycle time for process optimization," said Remo Kirsch, manager of Contamination Free Manufacturing at GLOBALFOUNDRIES Fab 1 in Dresden, Germany. "Both our production and development lines now rely on this technology to help guarantee process quality and yield stability."

As device features shrink, achieving acceptable yields becomes increasingly challenging. Complex interactions between process conditions and design produces "hot spots" - areas where the printed pattern deviates from the design intent - which must be eliminated before a chip can go into production. Integrating design and real-time inspection data provides customers with an innovative way to identify hot spots in a production environment and improve their product qualification process. In addition, the conditions that produce hot spots can be fed back to the design process - improving subsequent designs. This is a critical benefit in today's fast-changing, high-mix chip fabrication operations.

"As product development cycles become shorter and shorter, the game has changed from yield maximization to yield ramp," said Ronen Benzion, vice president and general manager of Applied's Process Diagnostics and Control Business Unit. "Our groundbreaking work with Magma will help our customers speed their new products to market and reduce time-to-revenue."

"Without the ability to overcome litho qualification roadblocks rapidly, 22nm designs will be extremely time-consuming and expensive to bring to volume production," said Ankush Oberai, general manager and vice president of Magma's Fab Analysis Business Unit. "By combining Magma's CAD-based analysis technology with Applied's advanced defect inspection and review systems, we can compress design cycles and accelerate learning for future product generations."

Source: http://www.appliedmaterials.com/

Citations

Please use one of the following formats to cite this article in your essay, paper or report:

  • APA

    Applied Materials Inc.. (2019, February 12). Integration of Magma's CAD-Based Analysis Technology with Applied's Advanced Inspection Systems. AZoNano. Retrieved on October 31, 2024 from https://www.azonano.com/news.aspx?newsID=21793.

  • MLA

    Applied Materials Inc.. "Integration of Magma's CAD-Based Analysis Technology with Applied's Advanced Inspection Systems". AZoNano. 31 October 2024. <https://www.azonano.com/news.aspx?newsID=21793>.

  • Chicago

    Applied Materials Inc.. "Integration of Magma's CAD-Based Analysis Technology with Applied's Advanced Inspection Systems". AZoNano. https://www.azonano.com/news.aspx?newsID=21793. (accessed October 31, 2024).

  • Harvard

    Applied Materials Inc.. 2019. Integration of Magma's CAD-Based Analysis Technology with Applied's Advanced Inspection Systems. AZoNano, viewed 31 October 2024, https://www.azonano.com/news.aspx?newsID=21793.

Tell Us What You Think

Do you have a review, update or anything you would like to add to this news story?

Leave your feedback
Your comment type
Submit

While we only use edited and approved content for Azthena answers, it may on occasions provide incorrect responses. Please confirm any data provided with the related suppliers or authors. We do not provide medical advice, if you search for medical information you must always consult a medical professional before acting on any information provided.

Your questions, but not your email details will be shared with OpenAI and retained for 30 days in accordance with their privacy principles.

Please do not ask questions that use sensitive or confidential information.

Read the full Terms & Conditions.