AIXTRON Receives Order for Carbon NanoTube System from Chalmers University of Technology

AIXTRON AG announced the order of a 2-inch AIXTRON R+D CNT* system from the Chalmers University of Technology, Sweden received in the fourth quarter of 2008. This combined thermal CVD and plasma enhanced CVD tool is planned to be delivered in first quarter 2009 and will be used for the deposition of CNT for micro-coolers, through silicon vias (TSV), sensors on CMOS and other nanotechnology based components.

Prof. Johan Liu, Chalmers University of Technology comments: “Our micro-cooler, TSV, sensor and electronics applications require well controlled vertically aligned CNT and AIXTRON’s CNT system is optimized exactly for this. AIXTRON has a proven track record with its R&D CNT platform, which has not only demonstrated reproducibility and reliability in the field, but also flexibility for new process development.”

AIXTRON is a world leading supplier of Chemical Vapour Deposition (CVD), Atomic Vapor Deposition (AVD) and Atomic Layer Deposition (ALD) equipment to the semiconductor industry, with over 1,500 systems delivered to date. AIXTRON-Nanoinstruments is focused on serving the Nanotechnology market through the manufacture of plasma enhanced CVD systems for carbon nanotubes (CNT) and other nanomaterials. AIXTRON’s nanotube and nanowire track record includes customers such as El-Mul Technologies, Harvard University, Kansas State University, Massachusetts Institute of Technology, Nanoconduction, Portland State University, Singapore Polytechnic, Santa Clara University, UC San Diego, University of Tuebingen, and Yale University.

*CNT= Carbon NanoTubes

Citations

Please use one of the following formats to cite this article in your essay, paper or report:

  • APA

    AIXTRON SE. (2019, February 14). AIXTRON Receives Order for Carbon NanoTube System from Chalmers University of Technology. AZoNano. Retrieved on October 31, 2024 from https://www.azonano.com/news.aspx?newsID=9750.

  • MLA

    AIXTRON SE. "AIXTRON Receives Order for Carbon NanoTube System from Chalmers University of Technology". AZoNano. 31 October 2024. <https://www.azonano.com/news.aspx?newsID=9750>.

  • Chicago

    AIXTRON SE. "AIXTRON Receives Order for Carbon NanoTube System from Chalmers University of Technology". AZoNano. https://www.azonano.com/news.aspx?newsID=9750. (accessed October 31, 2024).

  • Harvard

    AIXTRON SE. 2019. AIXTRON Receives Order for Carbon NanoTube System from Chalmers University of Technology. AZoNano, viewed 31 October 2024, https://www.azonano.com/news.aspx?newsID=9750.

Tell Us What You Think

Do you have a review, update or anything you would like to add to this news story?

Leave your feedback
Your comment type
Submit

While we only use edited and approved content for Azthena answers, it may on occasions provide incorrect responses. Please confirm any data provided with the related suppliers or authors. We do not provide medical advice, if you search for medical information you must always consult a medical professional before acting on any information provided.

Your questions, but not your email details will be shared with OpenAI and retained for 30 days in accordance with their privacy principles.

Please do not ask questions that use sensitive or confidential information.

Read the full Terms & Conditions.