Entegris Launches Ultrapak 100 mm Thin Wafer Shipper

Entegris, Inc. introduced a wafer shipper that specifically meets the critical handling needs of thin silicon (Si) and compound semiconductor wafers.

The new Ultrapak® 100 mm Thin Wafer Shipper is designed to reduce damage and contamination in order to better protect thin substrates used in LED manufacturing and other applications. The new product is being featured with other LED solutions at the Company's booth at the SEMICON Korea 2011 tradeshow being held in Seoul, Korea on January 26, 2011.

Currently, the LED industry predominantly uses shippers designed for semiconductor applications. These silicon wafer shippers are not designed for thin Si and compound semiconductor applications and can cause wafer damage or breakage, cross-slotting and particle generation via rotation if used in these sensitive applications. The new Ultrapak 100 mm Thin Wafer Shipper, which leverages the proven technology and design of Entegris' Ultrapak family of wafer shipping products, offers several design features that help thin Si and compound semiconductor manufacturers reduce these risks, including:

  • Cradle strap support (upper and lower cushions) of the wafer that limits wafer rotation, thereby reducing particle contamination, and secures the wafers in the cassette to safeguard against breakage.
  • Enhanced perimeter support of the substrate via extended upper cushion and lower cushion to reduce stress levels during impact events during transport.
  • Ultrapure polypropylene materials that provide a clean shipping environment and assure low levels of outgassing to prevent haze or changes to the wafer surface.
  • Robotic pickup flanges on the cassette to allow for convenient handling.
  • Center notch track alignment and an "H" bar to help assure accurate equipment interoperability for both vertical and horizontal wafer transfers.
  • Secondary packaging design that holds eight shippers at a time, helping protect up to 200 wafers.

The Ultrapak 100 mm shipper successfully passes ISTA-2A procedure for free-fall drop with 150um thick Ge wafers using Entegris' designed secondary packaging. It also passed a battery of other functional tests using 300um, 200um, and 150um thin wafers.

Source: http://www.entegris.com/


Please use one of the following formats to cite this article in your essay, paper or report:

  • APA

    Entegris. (2019, February 12). Entegris Launches Ultrapak 100 mm Thin Wafer Shipper. AZoNano. Retrieved on July 14, 2024 from https://www.azonano.com/news.aspx?newsID=21343.

  • MLA

    Entegris. "Entegris Launches Ultrapak 100 mm Thin Wafer Shipper". AZoNano. 14 July 2024. <https://www.azonano.com/news.aspx?newsID=21343>.

  • Chicago

    Entegris. "Entegris Launches Ultrapak 100 mm Thin Wafer Shipper". AZoNano. https://www.azonano.com/news.aspx?newsID=21343. (accessed July 14, 2024).

  • Harvard

    Entegris. 2019. Entegris Launches Ultrapak 100 mm Thin Wafer Shipper. AZoNano, viewed 14 July 2024, https://www.azonano.com/news.aspx?newsID=21343.

Tell Us What You Think

Do you have a review, update or anything you would like to add to this news story?

Leave your feedback
Your comment type

While we only use edited and approved content for Azthena answers, it may on occasions provide incorrect responses. Please confirm any data provided with the related suppliers or authors. We do not provide medical advice, if you search for medical information you must always consult a medical professional before acting on any information provided.

Your questions, but not your email details will be shared with OpenAI and retained for 30 days in accordance with their privacy principles.

Please do not ask questions that use sensitive or confidential information.

Read the full Terms & Conditions.