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PI’s Miniature 6-Axis Piezo Hexapod for Dynamic Active Error Compensation

PI (Physik Instrumente) L.P., a leader and solution provider in motion control and positioning components and systems, introduces a miniature hexapod, designed for dynamic error correction in all three linear and rotation axes.

The P-915KWEF joins PI‘s hexapod portfolio of over 100 products from palm-sized units to high-load systems capable of positioning several tons with sub-micron precision.

Compact & Stiff

With a load capacity of 1500g, this miniature hexapod was designed for dynamic error correction for six degrees of freedom. The parallel-kinematic design with piezo actuator direct drives results in a very compact and stiff positioning solution, compared to conventional multi-axis designs.

It is easily mounted inside rotary stages to virtually eliminate wobble and eccentricity errors and can be adapted to other long travel positioning systems for improved multi-axis motion accuracy.

For more Information, Specifications and Datasheets click here

Capacitance direct metrology sensors provide absolute, sub-nanometer precision position feedback with high bandwidth. The stiff, frictionless flexure design enables exceptional responsiveness and accuracy.

Applications of the P-915KWEF

  • Dynamic optimization of axial runout eccentricity and evenness of rotation stages
  • Vibration insulation
  • Fine adjustment
  • Mechanical manufacturing and machining processes.

Features & Advantages

  • Very Stiff Design, 1kHz Natural Frequency, High Dynamics
  • 6 Axis System: XYZ, Pitch, Yaw, Roll
  • 1 Nanometer Linear Resolution, 0.07µrad Angular Resolution
  • Positioning Range up to 70µm
  • Absolute Measuring, Direct Metrology Capacitance Sensors for Closed-Loop Operation
  • Space-Saving, Parallel-Kinematics Design for Easy Integration
  • Wear-Free Piezo Drives, Operate in Strong Magnetic Fields / High Vacuum

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