High Performance R-Theta 2-Axis Stages for Nanometer Precision Motion in Semiconductor and Laser Processing Applications

R-Theta stage motion systems are better suited to circular, elliptic and spiral motion patterns than conventional Cartesian 2-axis XY linear translation stages.

Image Credit: PI (Physik Instrumente) LP

PI Offers Three Classes of R-Theta Stages

  1. For the highest performance and precision, Air Bearing linear stages and air bearing rotary tables are used.
  2. Hybrid R-Theta systems use linear motor driven stages with mechanical bearings and direct-drive air bearing rotary tables.
  3. Direct Drive linear motor stages and direct drive rotary tables with mechanical bearings are also available.

R-Theta systems often find applications in precision laser / semiconductor applications due to higher throughput, higher precision and smaller footprint. Watch video of an all air bearing R-Theta stages.

High Speed Motion Controllers

The stages are operated by PI’s ACS-based industrial motion controllers with ultra-fast triggers for synchronization with external equipment such as cameras, sensors or lasers. The fast controllers allow highly precise triggering with 0.01% time tolerance between signals. Trigger signals can be derived off absolute encoders or analog signals (sin/cos encoder), enabling higher precision, safer, and simplified solutions as compared to outdated digital encoder-only triggers. With the modern PI motion controllers, a trigger in an R-Theta configured system will work just as well as an XY position trigger, with the coordinate specifications simply defined in polar coordinates.

Read article on R-Theta stages

Working with You

PI’s in-house engineered solutions have enabled customers around the world to increase their productivity and technological advantage for 5 decades. With a large basis of proven motion technologies and methodologies, PI is in the position to quickly modify existing designs or provide a fully customized OEM solution to fit the exact requirements of your application from sensors and piezo transducers to microscope nano-focus units, fast photonics alignment systems to multi-axis automation sub-systems.

Source: http://www.pi-usa.us/en/

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