Semiconductor manufacturing is one of the most complicated and demanding industrial processes in the modern era.
Image Credit: Cubic Sensor and Instrument Co. Ltd
Semiconductor manufacturing is the foundation for technologies ranging from smartphones and electric vehicles to artificial intelligence and cloud computing. The process demands extreme precision in monitoring, ultra-clean environments, and strict control of process parameters.
Semiconductor Manufacturing Process Monitoring Demands
The production process begins with refining raw silicon into high-purity material, which is then shaped into monocrystalline ingots and sliced into thin wafers. These steps are typically carried out in cleanrooms to prevent contamination that could compromise wafer quality.
Cleanroom environments are used throughout nearly every stage of semiconductor manufacturing, with cleanliness requirements varying based on the sensitivity of each process step. ISO 14644 standards classify cleanrooms by the concentration of airborne particles, providing a standardized framework for assessing and maintaining air cleanliness in controlled environments.
Environmental air quality monitoring is therefore critical—not only for managing particulate matter, but also for monitoring temperature and humidity, as even slight deviations can result in defects.
To create intricate circuit structures, wafers then undergo a series of core fabrication steps, including oxidation, photolithography, etching, ion implantation, deposition, metallization, and chemical mechanical polishing (CMP).
These processes rely heavily on specific gases and chemicals, which must be delivered with high precision to ensure consistent reactions and material properties. As a result, process quality monitoring is essential to maintain stable gas concentrations, flow rates, and pressure levels.
In the final stage, processed wafers are cut into individual chips, then packaged and tested to confirm they meet performance and reliability standards before shipment. During cleaning, sealing, and packaging, workers may encounter hazardous or flammable gases. As a result, safety monitoring is essential to protect both people and equipment.
Cubic Semiconductor Manufacturing Process Gas Sensing Solutions
Cubic, a manufacturer of gas sensors and analyzers with over 20 years of experience in sensing technology R&D, offers targeted solutions for semiconductor manufacturing in three key areas: environmental air quality, process quality, and production safety monitoring.
For environmental air quality, Cubic has developed an online optical particle counter based on light-scattering technology. The device uses a high-power industrial-grade laser and photoelectric conversion to detect airborne particles in real time across six size ranges: 0.3 μm, 0.5 μm, 1.0 μm, 2.5 μm, 5.0 μm, and 10.0 μm.
This level of precision is necessary for assessing cleanroom performance according to ISO 14644 standards and supports continuous monitoring in sensitive semiconductor areas.
The particle counter features a 3.5-inch multilingual touch screen and supports RS485 and MQTT protocols for integration. Cubic also provides IAQ transmitters using NDIR and MEMS MOX technology for real-time monitoring. These solutions support wireless transmission, allowing flexible installation and reducing wiring requirements. A built-in touch screen enables users to view data, change settings, and perform on-site calibration.
Cubic provides trace moisture and trace oxygen sensors based on TDLAS technology to support process quality monitoring in semiconductor manufacturing. These sensors offer high sensitivity, fast response times, and long-term stability.
They are designed to detect ultra-low concentrations of moisture and oxygen in high-purity gases such as nitrogen, hydrogen, and argon, which is essential for maintaining the strict purity levels required in oxidation, deposition, and etching processes. Cubic’s moisture sensors detect H2O concentrations as low as 1 ppm, while the oxygen sensors measure down to 0.1 ppm. Both feature good linearity and low cross-sensitivity.
Cubic also supplies pressure sensors and mass flow controllers with modular designs for flexible integration. These devices are chemically resistant to corrosive gases and vapors, ensuring durability and reliability in harsh environments. The integrated solution helps reduce process variability and maintain consistent quality.
For safety production monitoring, Cubic offers solutions for environments where toxic and reactive gases are used. Gas leaks pose serious risks to personnel and equipment, so early detection is critical.
Cubic’s sensors are based on dual-beam NDIR technology. They are designed to monitor tungsten hexafluoride (WF6) and silicon tetrafluoride (SiF4), both commonly used in etching and thin-film deposition. The sensors offer high accuracy, long-term stability, and reliable performance for continuous monitoring.
Cubic’s safety monitoring systems support both analog and digital communication and integrate easily into existing infrastructure, enabling real-time alerts and effective hazard management.
As semiconductor manufacturing evolves, the need for accurate, reliable, and integrated monitoring grows. Cubic’s gas sensing technologies—covering air quality, process quality, and safety monitoring—offer a complete response to industry requirements.
With a focus on core sensor development and user-driven innovation, Cubic supports cleaner environments, stable processes, and safer operations across the semiconductor manufacturing lifecycle.
This information has been sourced, reviewed and adapted from materials provided by Cubic Sensor and Instrument Co. Ltd.
For more information on this source, please visit Cubic Sensor and Instrument Co. Ltd.