AXIS Supra (XPS) Surface Analysis Instrument

An X-ray photoelectron spectrometer is defined by the ability of its spectroscopic and imaging functions to perform in challenging research and development laboratories. The AXIS Supra excels at both and couples the field leading automation with the flexibility to incorporate complementary surface analytical techniques. Simple to use, with automated sample loading and exchange, integrated camera system, ESCApe data acquisition and processing software, the AXIS Supra really is made to measure.

With patented AXIS technology at its heart the AXIS Supra is an instrument with peerless spectroscopic and imaging performance. The mu-metal analysis chamber is designed to accommodate optional excitation sources such as an achromatic Al/Mg X-ray source, UV He discharge lamp for ultra-violet photoelectron spectroscopy (UPS) and field-emission electron source for scanning Auger electron spectroscopy (AES) and secondary electron microscopy (SEM). Fitting sample preparation and surface modification options to sample introduction chamber, or Flexi-lock, is also a breeze. Options available for this chamber include sample heating and cooling, air sensitive sample transporter, broad spot ion source, crystal cleaver and glove box. An optional third chamber, the surface science station, provides a dedicated UHV chamber which can be fitted with a manual sample stage and a range of options for surface science studies and in-situ sample preparation.

Capabilities of the AXIS Supra

Large Area, High Sensitivity XPS

First and foremost, the AXIS Supra is a high performance X-ray photoelectron spectrometer. Efficient collection of photoelectrons by the magnetic and electrostatic lenses along with the high transmission 165 mm mean radius hemispherical analyzer ensures that the AXIS Supra has unparalleled sensitivity and resolution. Spectra are collected in traditional scanned mode or fast, unscanned snap-shot mode where the delay-line detector (DLD) can be used to acquire them in less than a second.

Key attributes include:

  • Easy detection of light elements.
  • Excellent signal-to-noise, even at low concentrations.
  • Quick data acquisition

Small Spot, Selected Area Spectroscopy

By putting a motorized aperture into the electrostatic lens column and forming a virtual probe at the sample surface, selected area spectroscopy can be achieved. This approach means that selected area spectroscopy can be performed with either the monochromatic or achromatic dual anode X-ray source. Spectra are acquired from pre-defined analysis areas as small as 15 μm diameter from any position within the field of view of the lens. Key attributes include;

  • Pre-defined small spot analysis areas.
  • Optimized x-ray illumination for selected area performance.
  • Click and analyze multipoint spectroscopy without sample movement.

High Energy Resolution

The primary application of the AXIS Supra is as a photoelectron spectrometer for chemical state characterization of the surface. Excellent resolution performance is attributed to the 500 mm Rowland circle monochromated Al Ka X-ray source and optimized electron optics.

  • Unambiguous identification of chemical shifts.
  • Guaranteed energy resolution on insulating and conducting samples.

Fast Parallel Imaging

The Axis Supra can also be used for parallel imaging, where an image of the sample surface is projected via the unique spherical mirror analyzer (SMA) onto the 2D delay-line detector. This allows the lateral distribution of surface chemistry to be investigated. Fast parallel imaging produces images with higher spatial resolution than the more traditional mapping approach.

  • Ultimate spatial resolution of 1 μm at the highest magnification.
  • Simple mouse click on image to define area of interest for selected area spectroscopy.
  • Stitched imaging - combining parallel images with stage movements allows high spatial resolution images to be acquired over areas of several millimeters.
  • Quantitative imaging – the unique SMA operates in fixed analyzer transmission which ensures that energy resolution is constant as a function of kinetic energy allowing quantitative chemical state imaging.
  • Spectromicroscopy – easy acquisition of spectra from images where a series of images are acquired over a defined energy range to produce a spectrum at each pixel.

Unrivaled Instrument Automation

The AXIS Supra is set apart from any other X-ray photoelectron spectrometer currently available by its complete automation feature. By using the Flexi-lock sample magazine and autostage in coordination, unattended sample transfer and exchange during analysis is realized in the sample analysis chamber. Auto exchange of sample holders during analysis ensures exceptionally high sample throughput removing the rate-limiting step previously associated with sample loading. Calibration is automated by motorization of both X-ray source and X-ray mirror. Switching between monochromated Al Ka and the optional Ag La excitation sources is under full computer control. Where gas introduction to the vacuum system is required such as ion etching or UPS, gas handling and pressure regulation is fully automated. Automation extends to data interpretation with auto-peak ID integrated into the ESCApe processing software.

  • Automated sample introduction and exchange.
  • Computer controlled X-ray source and mirror.
  • Automated gas introduction and pressure regulation for ion sources and UV lamp.

AXIS Supra (XPS) Surface Analysis Instrument

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