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Miniaturized Piezo Linear Stages with Robust Bi-Phase Motors

Novel bi-phase piezo motor enables accurate linear motion in an extremely compact package, new from PI.

PI’s B-421 miniaturized piezo stages provide 10 nm positioning resolution in an extremely compact package. X, XY, XZ and XYZ combinations are available, with travel ranges from 13 to 32 mm. Image Credit: PI (Physik Instrumente) LP

PI, a global leader in nanopositioning, precision motion control systems, and air bearing technology, introduces the innovative B-421 BIX nanopositioning stages — compact, high-precision linear positioning systems designed for applications requiring reliable and accurate motion in extremely space-constrained environments.

Equipped with integrated linear encoders with 6 nanometer position resolution and advanced dual-phase piezo inertia motors, BIX stages deliver smooth, backlash-free performance with excellent repeatability, and a minimum incremental motion of just 0.01 microns per step.

Unlike conventional stick-slip motor stages, the BIX series utilizes two miniature piezo stacks, manufactured in-house by PI’s piezo ceramics division, PI Ceramic. This advanced bi-phase inertia drive technology delivers higher drive and holding forces, increased velocity, and extended operational lifetime compared to traditional stick-slip solutions.

XY, XZ, and XYZ Multi-axis Stage Combinations

The BIX linear stage design supports multi-axis configurations and offers travel ranges of up to 32 mm, making these miniature nanopositioning stages ideal for high-precision motion applications, such as bio-nanotechnology, super-resolution microscopy, metrology, life sciences, spectroscopy, micro-assembly, photonics, semiconductor manufacturing, and interferometry.

Stick-Slip Drive Technology Background

Stick-slip inertia motors operate on a principle similar to the classic tablecloth trick, using piezoelectric actuators driven by a modified sawtooth voltage signal from dedicated control electronics. During the slow expansion phase, the actuator gradually moves a runner forward. When the actuator contracts rapidly — within microseconds — the runner’s inertia prevents it from following, resulting in net forward motion. A symmetrical motor configuration ensures consistent performance in both forward and reverse directions.

Piezo Motor Controller and Software

The E-881 BIX piezo motor controller is designed for high-performance control of low-voltage, two-phase stick-slip piezo motors, enabling smooth, precise motion with nanometer resolution. It features integrated encoder feedback, digital servo control electronics, and is compatible with PI’s PIMikroMove® software. Communication is supported via USB and TCP/IP interfaces. Additional features include programmable digital outputs, and a built-in data recorder. The controller comes with an extensive set of drivers, e.g., for use with C, C++, C#, NI LabVIEW, MATLAB, Python, and a virtual startup emulator for testing without hardware.

Industries Served

Metrology, super-resolution microscopy, life sciences, spectroscopy, interferometry, micro-assembly, photonics, semiconductor technology and bio-nanotechnology

Specifications, datasheet:

B-421 BIX Miniature Linear Stage

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