For applications that require high precision but do not justify the use of air bearings, PI’s new V-700 series mechanical bearing XY stages are among the most capable low-profile XY-positioning systems available. The V-783 high-precision XY linear motor stage provides long travel, nanometer-level positioning, and smooth high-speed scanning. Designed and manufactured in the USA, the stage features a 360 x 360 mm aperture and is optimized for semiconductor inspection, photonics alignment, metrology, imaging, biotechnology, laser microprocessing, precision assembly, microscopy, and advanced automation systems.
PI’s new linear-motor driven XY stage with large aperture, > 12 x 12” travel and nanometer resolution is designed and manufactured in the USA. Image Credit: PI (Physik Instrumente) LP
The stage offers ± 155 mm travel in each axis (> 12”) in a compact monolithic XY configuration that combines a lower profile with greater stiffness than conventional designs made of individual direct-drive linear stages. The large open-aperture enables transmissive light applications, while direct-drive brushless ironless linear motors eliminate backlash and drivetrain play for smooth, highly repeatable multi-axis motion.
Key Specifications
- 12.2 x 12.2” travel (310 × 310 mm) – ideal for 300 mm wafers
- 360 x 360 mm aperture – for transmissive light applications
- 1 nm encoder resolution; incremental or absolute encoder options
- 1 m/s velocity and 10 m/s2 acceleration
- ± 0.07 µm repeatability; ± 0.17 µm positioning accuracy
- 0.75 µm straightness and flatness
- Monolithic XY design with 50 kg load capacity and high stiffness
The absolute encoder option provides immediate position information after power-up, eliminating homing procedures and improving machine availability.
Motion Controllers and Software
Combined with PI’s A-800 series, ACS-based motion controllers, the stage becomes part of a high-performance motion system supporting synchronized multi-axis operation, EtherCAT networking, and advanced servo-control capabilities. For applications that don’t require air bearing performance, the V-783 stage is a great choice. Combining direct-drive performance, nanometer-resolution feedback, high geometric accuracy, and long travel in a compact design, the stage provides OEMs and system builders with a robust positioning platform for precision inspection, manufacturing, and automation applications.
Industries Served and Applications
Semiconductor manufacturing, photonics, optical inspection, flat panel display inspection, metrology, microscopy, laser processing, precision automation.
XY Stage with Large Aperture and Linear Motors
V-783 XY-Linear Stage in Motion. Video Credit: PI (Physik Instrumente) LP