Nanometrology Sensors Measuring Displacement, Vibration, Thickness - New Brochure From Physik Instrumente

PI (Physik Instrumente) L.P. a leading manufacturer of ultra-precision motion-control and sensing equipment for bio / nanotechnology, photonics, semiconductor and life science applications  -  offers a new brochure on capacitive nanometrology displacement sensors and electronics.

The brochure presents PI’s state-of-the-art sensor systems and also features a tutorial on single plate and dual plate capacitive sensors and an applications overview:

  • Measuring Displacement with Nanometer Precision
  • Nanopositioning / Closed-Loop Systems
  • Parallel Metrology / High-Precision Multi-Axis Measurements
  • Measuring Straightness and Flatness / Active Cross-Talk Compensation
  • Out-of-Plane Measurement / Constant-Height Scans / Out-of-Round Measurement
  • Tip / Tilt Measurement and Compensation
  • Measuring Vibration, Flatness, Thickness
  • Force Sensors with Micronewton Sensitivity
  • Layer Thickness Measurement with Sub-Micron Accuracy

The brochure is free of charge and can be ordered from PI; a PDF is also available for download at

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