ZEISS MultiSEM 505/506 - Fast SEM Designed for Continuous Operation

Users can now unleash the acquisition speed of up to 91 parallel electron beams with ZEISS MultiSEM, which can image samples in the centimeter-scale at nanometer resolution. The scanning electron microscope (SEM) system is designed for reliable and continuous 24/7 operation. Users can automatically acquire high contrast images through MultiSEM by simply setting up their high-throughput data acquisition workflow.

MultiSEM is controlled with the proven ZEN imaging software and all of its options are organized in an intuitive yet flexible manner.

The ZEISS MultiSEM 505 scanning electron microscope received Microscopy Today Innovation Award in 2015.


Acquire Your Images at Highest Speed and Nanometer Resolution

  • Up to 91 electron beams can work in parallel with unmatched imaging speed
  • MultiSEM takes less than 3 hours to image an area of 1 cm² at 4 nm pixel size
  • Optimized SE detection enables high contrast images to be acquired at low noise levels

Acquire and Image Huge Samples

  • MultiSEM comes with a sample holder, covering a total area of 10 cm x 10 cm
  • Users can image the whole sample and discover everything they need to solve their scientific questions
  • Automatic acquisition protocols enable large area imaging, users will be able to get the detailed nanoscale image without losing the macroscopic structure

ZEN Imaging Software

  • Users can control MultiSEM in a simple, intuitive way with the ZEN software, proven for all ZEISS imaging systems
  • Smart auto-tuning routines support users while capturing images with high contrast and high resolution
  • With the ZEN imaging software, users can rapidly and easily set up complex automatic acquisition procedures that are adapted and tuned to their samples


MultiSEM employs both multiple electron beams (green: illumination path) and detectors in parallel, and a finely tuned detection path (red) collects a large yield of secondary electrons (SE) for imaging. Each beam performs a synchronized scanning routine at one sample position, producing a single sub-image. These beams are set in a hexagonal pattern. By merging all image tiles together, the full image is formed.

For fast data recording, a parallel computer setup is used for rapid data recording that improves the total imaging speed. In the MultiSEM system, both image acquisition and workflow control processes are fully separated.

Integrated Workflow

Serial Array Tomography for Acquisition of Large Volumes

  • Users can automatically section the resin-embedded biological tissue with the ATUMtome, which can gather up to 1000 serial sections in one day
  • The section tape can be mounted on a silicon wafer and image the sample with a ZEISS light microscope. Shuttle & Find and the ZEN imaging software can be used to create an overview image. The wafer can then be transferred to MultiSEM and the overview image can be used to navigate the sample using the same ZEN user interface
  • The complete acquisition workflow experiment is set up with a single graphical control center. The efficient automated section detection enables users to identify and target their regions of interest in a short period of time

ZEISS MultiSEM 505/506: Fast SEM Designed for Continuous Operation

Revolutionize the Speed of Electron Microscopy
Mouse brain
Silicon test sample
Femoral neck sample
Zebrafish brain
Graphical processor
Integrated circuit
Integrated Workflow 1
Integrated Workflow 2

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