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New Precision Linear Stage Family for Ultra High Vacuum Applications

A leader in nanopositioning solutions, PI (Physik Instrumente) LP introduces a new high precision linear translation stage family for High Vacuum (HV) and Ultra High Vacuum (UHV) applications. The L-509 vacuum stage series is offered for 3 different vacuum levels: 10-6 hPa, 10-7 hPa, and 10-9 hPa.

Different Linear Motion Ranges

Linear motion ranges of 26 mm, 52 mm, and 102 mm are available. The precision-ground ball screw and high resolution motors allow sub-micrometer resolution with excellent position repeatability up to 0.1 microns.

Different Bake-out Temperature Ranges, Different Motors

The new vacuum linear stage series was designed from the ground up for vacuum compatibility, with each component qualified to work under the specified conditions. Everything, from the base materials, nuts and bolts, encoders, cables, limit switches was selected for optimal performance.

Stage variants with closed-loop servo motors with position feedback encoders can be baked out up to 250 °F (~120 °C), while for the highest vacuum levels, stepper motors (open loop operation) are used. Here, bake-out temperatures of up to 300 °F (~150 °C) can be reached.

Specifications, Datasheets, More Information»

More Vacuum Compatible Stages»

Other Vacuum and UHV Positioning Products

PI provides a wide range of vacuum and UHV compatible linear stages and rotary stages for nanopositioning and micropositioning applications, including piezo flexure stages, piezo motor solutions and even multi-axis systems such as 6-DOF hexapod parallel positioners to cover the most demanding vacuum motion applications. Industries served include semiconductors, aerospace, optics and photonics, precision automation, life-sciences, and big science research.

Working with You

PI’s in-house engineered systems and components have enabled customers around the world to increase their productivity and technological advantage for 5 decades. With a large basis of standard precision motion products and proven methodologies, PI is in the position to quickly modify existing designs or provide a fully customized OEM solution to fit the exact requirements of your application from the whole motion range from finger-tip sized nano-positioners to large scale stages with long travel ranges, through a plethora of different drives and guiding systems.

Source: https://www.pi-usa.us/en/

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