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Vacuum Compatible Miniature Linear and Rotary Stages, New from PI

PI’s family of miniature micro and nanopositioning stages is expanding with the new RS-40 rotary stage and M-111 linear stages as engineers gave specific consideration to material selection, use of lubricants and coatings, and outbakeing temperatures for high and ultra-high vacuum conditions.

Precision Miniature Rotary Stage for Compact Spaces

With 360 degree rotation range and 20 N load capacity, the RS-40 V7 stage boasts high angular velocity of 20 °/sec and minimum incremental motion and repeatability of 87 µrad. The 20 mm Ø aperture allows rotation of filters and optics. The compact size makes the RS-40 rotary stage ideal for small vacuum chambers. The new RS-40 stage is powered by a special vacuum rated stepper motor and suitable for vacuum levels up to 10-7 hPa.

Compact Linear Stage and XY / XYZ Combinations

The new 110, M-111 and M-112 vacuum linear stage series provide travel ranges of 5, 15 and 25 mm and are suitable for vacuum up to 10-6 hPa. The linear stages also provide a clear aperture (Ø 10 mm). The miniature linear stages are powered by a closed-loop DC gear motor with an integrated encoder, and backlash-compensated leadscrew and provide sub-micrometer resolution with 0.05 µm minimum incremental motion and excellent position repeatability up to 0.25 microns.

Specifications, Datasheets, More Information

RS-40 V7 Compact Rotation Stage Suitable for Vacuum»

M-110 • M-111 • M-112 V6 Compact Linear Stage Suitable for Vacuum»

Other Vacuum and UHV Positioning Products

PI provides a wide range of vacuum and UHV compatible linear stages and rotary stages for nanopositioning and micropositioning applications, including piezo flexure stages, piezo motor solutions and even multi-axis systems such as 6-DOF hexapod parallel positioners to cover the most demanding vacuum motion applications. Industries served include semiconductors, aerospace, optics and photonics, precision automation, life-sciences, and big science research.

Read the article “Advances in Precision Positioning Stage Design-Optimized Outgassing and Motion Performance in Ultra-High Vacuum Applications”

Working with You

PI’s in-house engineered systems and components have enabled customers around the world to increase their productivity and technological advantage for 5 decades. With a large basis of standard precision motion products and proven methodologies, PI is in the position to quickly modify existing designs or provide a fully customized OEM solution to fit the exact requirements of your application from the whole motion range from finger-tip sized nano-positioners to large scale stages with long travel ranges, through a plethora of different drives and guiding systems.



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