PI (Physik Instrumente), a global leader in precision motion control and nanopositioning, offers the N-332 family of high-force piezoelectric linear stages for applications requiring nanometer-level precision motion, high drive force, and stable position holding, even without continuous power consumption.
An UHV-compatible XYZ combination of PI’s V8 PiezoWalk motor-driven N-332 piezo nanopositioning stage. Image Credit: PI (Physik Instrumente) LP
Based on PI's V8-PICMAWalk piezo motor technology, the N-332 combines 75 N (16.5 lb) active drive force with 3 nm minimum incremental motion and travel ranges of 25 mm or 50 mm. Unlike conventional piezo flexure stages with limited travel, the walking-drive principle enables motion over several centimeters while maintaining nanometer positioning capability.
High Force and Position Stability Without a Brake
The N-332 uses eight PICMA piezo actuators arranged in a V8 walking-drive configuration. Coordinated actuator motion advances the moving platform through a sequence of gripping and stepping movements.
The drive provides 75 N force in either direction and even higher passive holding force. When power is removed, the motor remains self-locking, maintaining position without continuous electrical power, heat generation, or servo activity. For suitable vertical-axis loads, this eliminates the need for a separate holding brake or counterbalance.
These characteristics are particularly useful in precision measurement systems where thermal stability and position holding are critical.
Long Travel and Nanometer Precision
The N-332 is available with 25 mm (1 in) and 50 mm (2 in) travel ranges and can achieve a maximum velocity of 12 mm/s (1/2 in/sec). An integrated, noncontact optical linear encoder measures the moving platform position directly, providing feedback for closed-loop positioning.
Crossed-roller bearings support accurate linear guidance, while the compact 80 mm-wide, 30 mm low profile stage design simplifies integration into space-constrained instruments.
Multiple stages can be combined into XY, XZ, and XYZ configurations for applications requiring precision positioning in several axes.
Designed for Demanding Ultra-High-Vacuum Applications
For semiconductor research, electron microscopy, and scientific instrumentation, UHV-compatible versions are available for pressures down to 10-9 hPa.
The self-locking PICMAWalk drive is especially advantageous in vacuum systems, where minimizing heat generation and maintaining stable positioning can be important design considerations.
Applications in Microscopy, Semiconductor Research, and Metrology
The combination of high force, nanometer positioning capability, and long travel in a compact package makes the N-332 suitable for demanding applications, including:
- Semiconductor research and metrology
- Nanoindentation and precision materials testing
- Scanning and transmission electron microscopy (SEM/TEM)
- High-resolution optical microscopy, including 4Pi microscopy
- Vacuum-compatible scientific instrumentation
The N-332 family is supported by PI's E-713 modular high-performance motion controller, providing integrated drive control and position feedback.
Applications and Industries Served
Semiconductor test, metrology and research, electron microscopy, quantum research, scientific instrumentation, UHV applications, physics experiments.
UHV-Compatible High-Force XYZ Piezo Nanopositioning Stage Driven by a V8- Piezo Motor | PI
UHV-Compatible High-Force XYZ Piezo Nanopositioning Stage Driven by a V8- Piezo Motor. Video Credit: Physik Instrumente USA - Precision Motion Control