High Accuracy Measurement of Film Thickness, Refractive Index and Reflectivity of Thin Films and Multilayer Stacks From HORIBA Scientific

Horiba Scientific has extended the performance capability of the UVISEL spectroscopic phase modulated ellipsometer with the integration of the VIP DUV Spectroscopic reflectometer. The combination of high precision ellipsometer and reflectometer measuring at the same sample position allows characterisation of features as small as 10 microns.

UVISEL spectroscopic phase modulated ellipsometer integrated with the VIP DUV Spectroscopic reflectometer

Applications of the UVISEL VIP include measurement of film thickness, refractive index and reflectivity of thin films and multilayer stacks with very high accuracy.

By the addition of a large area mapping stages of dimension 200mm, 300mm and above, and with integrated pattern recognition software the UVISEL VIP is able to characterise patterned materials found in semiconductor wafers, display materials, OLED structures and biosensors with thicknesses ranging from a few angstroms to several tens of microns.

The well proven DeltaPsi2 software package controls the complete instrument, and provides a simple interface for production, pilot plant and research applications.

Citations

Please use one of the following formats to cite this article in your essay, paper or report:

  • APA

    HORIBA Scientific. (2018, January 10). High Accuracy Measurement of Film Thickness, Refractive Index and Reflectivity of Thin Films and Multilayer Stacks From HORIBA Scientific. AZoNano. Retrieved on December 09, 2019 from https://www.azonano.com/news.aspx?newsID=4784.

  • MLA

    HORIBA Scientific. "High Accuracy Measurement of Film Thickness, Refractive Index and Reflectivity of Thin Films and Multilayer Stacks From HORIBA Scientific". AZoNano. 09 December 2019. <https://www.azonano.com/news.aspx?newsID=4784>.

  • Chicago

    HORIBA Scientific. "High Accuracy Measurement of Film Thickness, Refractive Index and Reflectivity of Thin Films and Multilayer Stacks From HORIBA Scientific". AZoNano. https://www.azonano.com/news.aspx?newsID=4784. (accessed December 09, 2019).

  • Harvard

    HORIBA Scientific. 2018. High Accuracy Measurement of Film Thickness, Refractive Index and Reflectivity of Thin Films and Multilayer Stacks From HORIBA Scientific. AZoNano, viewed 09 December 2019, https://www.azonano.com/news.aspx?newsID=4784.

Tell Us What You Think

Do you have a review, update or anything you would like to add to this news story?

Leave your feedback
Submit