The Hiden EQS is a high transmission quadrupole secondary ion mass spectrometry, SIMS, detector including a 45° electrostatic sector for simultaneous ion energy analysis.
It is basically a system for testing secondary positive and negative ions from solid samples. Ions are collected on the axis of the device. This feature makes it ideal for fitting as an after-market detector to a range of surface analysis instrumentation.
Additionally the standard EQS can also be used to monitor the residual gas with the help of an in-built electron impact ionizer. This can be used for detection of sputtered neutrals.
Key Features
The main features of the EQS are:
- High sensitivity pulse ion counting detector with seven decade dynamic range
- Raster control for improved depth profiling and imaging with integrated signal gating
- Triple filter quadrupole, mass options to 2500amu
- 45° electrostatic sector analyser, scan energy at 0.05eV increments/ 0.25eV FWHM
- Differentially pumped option for use in high pressure environments
- Penning gauge and interlocks to provide over pressure protection
- Minimal perturbation of ion flight path and constant ion transmission at all energies
- MASsoft control via RS485, RS232 or Ethernet LAN
- Can be easily interfaced to currently available systems
Applications
The main applications of the EQS are listed below:
- Catalysis
- Surface analysis
- Surface science
- Thin film and surface engineering