Posted in | MEMS - NEMS | Nanobusiness

Semi-Automated Solution from EV Group Completes Semefab MEMS fab2

Published on November 6, 2009 at 7:31 AM

Semefab (Scotland) Ltd, a leading, independent wafer fab foundry with an impressive track record of process development, induction and fabrication of MEMS, CMOS and ASIC technologies, today announced that it will further broaden its diverse process portfolio with the installation of an EVG520IS semi-automated wafer bonding system from EV Group (EVG). Complementing the equipment in its newly opened MEMS fab2 foundry, the company can now offer customers the widest range of wafer bonding processes such as anodic, thermo compression, fusion bonding, or LowTemp plasma bonding. In addition, the new EVG bonder will open new markets for Semefab, such as inertia sensing and wafer scale packaging.

The combined process know-how of both companies as well as joint R&D, pilot line production and prototype development at EVG's global headquarters in Austria will allow Semefab to develop and implement innovative, cost effective and high quality processes with its customers, ranging from start-up companies to established market leaders in their field.

"The EVG520IS, an ideal solution for small volume production as well as research & development, suits Semefab's unique approach very well." said Ian F. McNaught, MEMS Business Manager, Semefab (Scotland) Ltd. "Semefab occupies a unique market space where we support a MEMS development model and a MEMS commercial volume foundry model where development projects seamlessly transfer from development to volume manufacture,"

Paul Lindner, EVG's executive technology director, commented, "The MEMS community can trust in our ability to meet today's exacting manufacturing requirements, and we are excited that another leading MEMS foundry has chosen our equipment for its superior process capabilities, quality and support. The EVG520IS has been re-designed based on customer feedback as we share a similar philosophy with Semefab, which we at EVG call invent - innovate - implement."

The production proven EVG520IS wafer bonding system is a flexible, modular solution for wafers up to 200mm. Combining fully-automated bond process execution and bond cover movements with manual loading and unloading, the system offers an integrated, external cooling station for high throughput. It features EVG's proprietary symmetric rapid heating and cooling chuck design with independent top and bottom side heater, high pressure bonding capability and the same material and process flexibility as a manual system.

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