Tegal Corporation, an innovator of specialized production solutions for the fabrication of advanced MEMS, power ICs and optoelectronic devices, today announced it has received a repeat order for a Tegal 200 SE DRIE tool from a leading Japanese provider of MEMS devices. The Tegal 200 SE DRIE tool will ship in the current quarter, and will be used by the customer to rapidly increase production output of commercial MEMS products.
This repeat DRIE system order for Tegal was secured as a result of the continued successful cooperation between Tegal and Canon Marketing Japan, Tegal’s sales partner in Japan for the Tegal DRIE product line.
“Tegal is pleased to have our Tegal 200 SE DRIE Silicon Etch System selected as a repeat order by this important Japanese customer. DRIE process performance, tool repeatability, and etch uniformity are the key factors considered by our customer for again choosing Tegal,” said Yannick Pilloux, DRIE Product Manager, Tegal Corporation. “The fact that our customer has selected Tegal, after working in MEMS production for many years in the Japanese market, is a strong endorsement of the Tegal 200SE’s track record for production performance. I’m convinced that our etch tool will provide the necessary capabilities to further support our customer’s current and future manufacturing requirements.”
The Tegal 200 SE system is high-density plasma etch tool featuring an inductively coupled plasma etch reactor and magnetic plasma confinement. The tool can run Tegal’s patented SHARP – Super High Aspect Ratio Process, achieving etched feature aspect ratios of greater than 100:1 in production environments. Together with its high reliability, broad process windows, and high etch rates, the Tegal 200 SE system is a critical enabler for etching silicon (SE) films found in the MEMS, bio-tech, power IC, optoelectronic, and 3D-IC markets. Tegal DRIE tools are presently employed in numerous research and development laboratories throughout the world, engaging in both commercial and academic research programs, and are also found in MEMS foundries and other dedicated commercial High Volume Manufacturing lines world-wide.