Springer has published a MEMS Materials and Processes Handbook, an extensive resource for engineers and academicians dealing with micro-electromechanical systems (MEMS).
While developing common methods of MEMS fabrication, they experience a sheer learning curve and this MEMS-specific reference book serves as a significant practical resource for the MEMS segment.
The new reference book acts as a design resource for scientists probing for advanced materials, characteristics of identified materials or existing distinct methods for MEMS fabrication. The handbook will be useful for experienced engineers, researchers, students and other beginners dealing with MEMS and materials processing.
Reza Ghodssi, Director of the Institute for Systems Research, Herbert Rabin Distinguished Professor in the Department of Electrical and Computer Engineering at the University of Maryland and Pinyen Lin, Chief Technologist and Vice President of Business Development, Touch Micro-System Technology served as co-editors of the reference book. The handbook includes 35 globally contributing writers who are experts in MEMS fabrication techniques and also working in industries, academic institutions and in government labs.
The content of the reference book is divided into two separate portions- materials and fabrication processes. The Materials segment of the book includes the comprehensive ‘Material Selection Guide’ and ‘Material Database’ that highlights on choosing suitable materials for the ongoing process. The processes segment is arranged as an index of microfabrication methods. Every item includes a small introduction to the technology and also illustrations of its general benefits in MEMS. It also covers the impact of processing conditions in the characteristics of materials, demonstrating the mutual dependence and multidisciplinary aspect of MEMS fabrication. The book also includes chapters on common MEMS layout and MEMS process incorporation.
The handbook offers a practical knowledge to users regarding routine operations and regular methods followed in research laboratories and manufacturing plants. Much of the MEMS knowledge is availed by unofficial and non-procedural methods like discussions with fellow people at meetings.
Presently, researchers spend most of their time on building in-house instructions and distinct methods for creating MEMS structures. Every time they arrive at the possibility of wasting research works and ‘reinventing the wheel.’ The book solves this issue by offering case studies at the conclusion of every chapter along with simple illustrations developed by experienced MEMS professionals. Users will also be exposed to the recognition and description of tricking methods, arts and mysteries related to MEMS fabrication.
Ghodssi has stated that the significant feature of MEMS operations is the selection of materials, methods, incorporation and development of complicated homogenous, heterogeneous and hybrid structures. He mentioned that other than exposing micro/nano fabrication and materials concepts to readers, the handbook also highlights on tough and real-time problems faced by researchers in the laboratory.
Source: http://www.springer.com