Report Discusses Fabrication and Design of Resonant MEMS

Research and Markets has included a new report "Fabrication & Design of Resonant Microdevices Micro and Nano Technologies" to its offering.

This book explains the vital challenges involved in design, fabrication and applications of micromachined resonant equipment and methods that are normally used to process the output signal of resonant micro-electro-mechanical systems (MEMS). The book also offers an overview of the fabrication process for micromachined systems.

Resonant equipment has two ports. One input port can be used to stimulate the structure resulting in resonance. Another output port can control the device behavior. The book also covers topics such as excitation and signal detection techniques.

An analytic representation of the device behavior is presented and several numerical simulation methods are listed in the book. The book also includes the challenges met due to noise and damping for resonant MEMS, which are particularly relevant for high-Q equipment. Packaging problems and electronic interfacing are also explained in separate chapters. The book offers several examples of resonant MEMS from the industry and academia.

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