Advanced
Diamond Technologies (ADT) is pleased to announce the award
of a Phase I Small Business Innovation Research (SBIR) grant from the
National Science Foundation (NSF) for the development of
“Starter Wafers for Diamond MEMS Fabrication.”
“This project allows us to further expand the UNCD
DOI (diamond on insulator) product line by demonstrating the
integration of other common MEMS materials such as metals, nitrides,
and complex oxides with UNCD. We will show that diamond wafers with
outstanding uniformity can be manufactured in sizes up to 200 mm and
meet MEMS foundry standards for cleanliness and
reproducibility,” said ADT chief technical officer Dr. John
Carlisle.