Site Sponsors
  • Strem Chemicals - Nanomaterials for R&D
  • Oxford Instruments Nanoanalysis - X-Max Large Area Analytical EDS SDD
  • Park Systems - Manufacturer of a complete range of AFM solutions
Posted in | MEMS - NEMS | Nanobusiness

Advanced Diamond Technologies Receives Phase I SBIR from NSF for Diamond Starter Wafers

Published on July 24, 2007 at 11:56 AM

Advanced Diamond Technologies (ADT) is pleased to announce the award of a Phase I Small Business Innovation Research (SBIR) grant from the National Science Foundation (NSF) for the development of “Starter Wafers for Diamond MEMS Fabrication.”

“This project allows us to further expand the UNCD DOI (diamond on insulator) product line by demonstrating the integration of other common MEMS materials such as metals, nitrides, and complex oxides with UNCD. We will show that diamond wafers with outstanding uniformity can be manufactured in sizes up to 200 mm and meet MEMS foundry standards for cleanliness and reproducibility,” said ADT chief technical officer Dr. John Carlisle.

Tell Us What You Think

Do you have a review, update or anything you would like to add to this news story?

Leave your feedback
Submit