The ESPION Langmuir-style probe from Hiden
Analytical is believed to be the fastest, most versatile commercial electrostatic
probe currently available. The probe automatically reports the critical plasma
characteristics of electron density and energy distribution, electron temperature,
ion density, plasma potential and floating potential, providing the rapid accurate
feedback essential for plasma-based process analysis and control.
Pulsed plasma can offer benefits over continuous wave plasma for tailoring
of film growth and film properties. Fast on-board software controlled timing
circuitry with acquisition trigger resolution of 62.5 nanoseconds enables ESPION
to provide high-resolution segmented temporal analyses through a plasma pulse
at pulse frequencies as high as 3MHz. Other features include forced-air cooling
of the probe tip, a programmable self-cleaning cycle for automatic probe tip
decontamination, a very high RF blocking impedance for optimum data integrity,
and an integral reference probe compensation electrode for cancellation of fluctuations
due to low frequency drifting of the plasma potential.
Probes may be operated in both static and dynamic modes, with fully-programmable
UHV-compatible linear motion drives offering linear travel ranges to 900mm.
Systems are backed by over 20 years’ continuous manufacturing experience
in the field of plasma measurement together with a worldwide support network
of engineers and scientists with expert knowledge of plasma diagnostics and
processing.
For more information on particle
size analysis, click here.