introduce the new IG-5C Caesium Ion Gun for primary ion beam applications in
SIMS measurement of electronegative elements and for caesium cluster analyses.
With unique low-power, high-brightness ion source, compact ion column and beam
steering module the gun proves ideally suited to dynamic, static and imaging
The intense beam of caesium ions produced from the surface ionisation source
is highly focussed and generates a spot size adjustable down to just 20 micron.
The ion source assembly is compact, self-aligning and simple to replace. Beam
energy is variable from 5kev to 0.5kev, with beam currents to 150nA. The mounting
flange is the 2.75inch/70mm diameter Conflat-type flange and the unit is differentially
pumped to maintain true UHV pressures.
Control of the IG-5C is via a PC-based interface allowing easy and reproducible
set up. The interface controls the electrode parameters and thermal management
of the ion source, and provides configuration options for both high current
and small spot applications. The beam raster can be externally driven with a
minimum sweep time of 64 microsecond and through a beam deflection of +/-4mm.
An internal preset raster is additionally provided for surface preparation treatments.
Direct coupling with a Hiden MAXIM or EQS SIMS detector enables automated signal
gating for acquisition of data and surface imaging from any pre-defined area
within the total scanned surface.