Electron beam lithography (EBL) is an expensive although highly accurate nanolithographic technique with extremely small resolutions available.
http://www.azonano.com/article.aspx?ArticleID=1738 | 21 Sep 2006
Electron beam lithography (EBL) is an important technique, which is used to design devices, systems and functional materials at the nano scale. In this miniaturization technique, large-scale products...
http://www.azonano.com/article.aspx?ArticleID=3219 | 28 Feb 2013
Electron Beam Lithography (EBL) is a special technique for making the very fine patterns that are needed by the electronics sector for integrated circuits. EBL resists (Negative Tone and Positive...
http://www.azonano.com/article.aspx?ArticleID=1208 | 27 Apr 2005
Raith GmbH a leading provider
of Nano-Structuring and Lithography systems, announced today the installation
of a novel solution based on Raith's successful e-Line Electron Beam Lithography...
http://www.azonano.com/news.aspx?newsID=17239 | 27 Apr 2010
NIL Technology and IMS
Chips have started a collaboration to efficiently combine their capabilities
related to electron beam lithography. Whereas NIL Technology possesses key competences...
http://www.azonano.com/news.aspx?newsID=9593 | 27 Jan 2009
By Cameron Chai
The Knut and Alice Wallenberg Foundation has provided over SEK 50 million to the Chalmers University of Technology. The Chalmers Nanofabrication Laboratory will use SEK 22 million to...
http://www.azonano.com/news.aspx?newsID=24740 | 27 Apr 2012
Inc. has announced plans to attend and host a booth at the 53rd International
Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
http://www.azonano.com/news.aspx?newsID=11345 | 6 May 2009
Nanolithography is etching, writing or printing on a material surface. Lithographic techniques include Photolithography, Electron beam lithography, X-ray lithography, Extreme UV lithography, Light...
http://www.azonano.com/article.aspx?ArticleID=1736 | 20 Sep 2006
People involved with nanotechnology are looking for ways to build structures from the ground up as occurs in nature. To this end lithographic processes may be the answer. Photolithography, Electron...
http://www.azonano.com/article.aspx?ArticleID=659 | 23 Mar 2004
The NanoJapan Program, supported by the National Science Foundation, and administered
by Rice University, aims to increase the number of U.S. students pursuing studies
http://www.azonano.com/news.aspx?newsID=11562 | 18 May 2009