685 River Oaks Parkway
PH: 1 (408) 232-0600
Fax: 1 (408) 433-99904
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OAI is a leading manufacturer of reliable, precision equipment for MEMS, semiconductors, nanotechnology, cleanroom automation, and for UV light measurement. With products installed worldwide, OAI systems are used for both R&D and production of semiconductors, MEMS and microfluidic devices. From mask aligners and UV light sources to UV power meters, OAI is a leader in the industry for over 35 years.