Unique single-module 3-axis precision motion platform.
Ultra-low profile 3-axis nanopositioning stage is less than 40 mm tall. Image Credit: PI (Physik Instrumente) LP
PI (Physik Instrumente), a leader in precision motion control, has introduced the A-361 air-bearing XY-rotation stage, a compact nanopositioning platform engineered for ultra-high precision and stability in demanding research and industrial applications.
The A-361 XY-rotation stage combines an exceptionally low profile of just 39.5 mm with a generous 200 mm diameter motion platform. It provides translational motion of 5 mm in both X and Y, along with rotational motion around the Z axis of 2°.
Applications
The A-361 PIglide XY-theta stage is particularly well suited for wafer inspection, flat-panel display metrology, fiber and optics alignment, maskless lithography, and µLED manufacturing. Its clean, non-contact design, combined with ultra-high stability and resolution, make it a compelling solution for semiconductor and photonics production environments.
Frictionless Bearing Design, Lock-Down Mechanism for Ultra-High Stability
With its frictionless air bearings and non-contact motors, the A-361 ensures smooth motion without wear, enabling virtually maintenance-free operation and a service life measured in decades. Integrated position-locking further enhances stability, eliminating servo jitter in critical measurement and alignment tasks. A built-in vacuum chuck accommodates wafers or other delicate substrates, making the stage well suited for semiconductor and optics applications.
Frictionless Direct Drives, High Dynamics
Voice-coil direct drives provide frictionless, highly dynamic response, generating up to 6 N of continuous force and 19.2 N peak. Despite its compact footprint, the A-361 supports payloads up to 3 kg, and its lightweight design with hard-anodized aluminum construction ensures stability and durability.
Designed for cleanroom operation, the A-361 requires only dry, oil-free compressed air in accordance with ISO 8573-1 purity standards. Air consumption is limited to 28 L/min, making the system highly efficient for continuous operation. When combined with the A-523 Z Tip/Tilt Stage, the A-361 forms the basis of a versatile six-degree-of-freedom nanopositioning stack, enabling complete spatial control for precision alignment tasks in photonics, optics, and micro-assembly. Complementing the platform, PI provides integrated accessories such as air-preparation kits, multi-axis controllers, and custom cabling solutions, ensuring seamless system integration and enhanced performance.
Industries Served
Semiconductor test and wafer inspection, photonics and fiber alignment, precision optics alignment, flat panel inspection, maskless lithography, advanced LED manufacturing, tribology, material research.
