Frictionless motion with excellent velocity constancy for high-end test and manufacturing.
Motorized air bearings linear slides, such as the A-123, combine long travel ranges with nanometer precision and excellent geometric performance (straightness, flatness, pitch, yaw, roll). Image Credit: PI (Physik Instrumente) LP
PI, a global leader in precision motion control and air bearing positioning systems, offers the A-123 air bearing linear slide, a high-performance air bearing linear translation stage designed for ultra-precise scanning, metrology, inspection, and nanopositioning applications.
The A-123 combines a 3-phase linear motor, preloaded air bearings, and an integrated linear encoder to create a fully noncontact motion platform.
Air Bearings vs Mechanical Bearings
Unlike mechanical bearing linear stages that rely on rolling or sliding contact, air bearing stages float on a thin, pressurized film of air. This eliminates mechanical friction, wear, stiction, vibration, and particle generation, while improving straightness, flatness, velocity stability, and long-term repeatability.
The result is a precision linear slide engineered for demanding 24/7 applications in semiconductor manufacturing, flat-panel display production, photonics, metrology, optics, precision scanning, and advanced automation.
Key specifications include:
- Travel ranges from 50 mm to 750 mm
- Resolution to 1 nm
- Motion platform size of 210 mm × 210 mm
- Maximum velocity up to 1000 mm/sec
- Acceleration up to 30 m/sec2 unloaded
- Payload capacity up to 40 kg
- Cleanroom-compatible, friction-free motion
- Straightness and flatness errors as low as ± 0.25 µm, depending on travel range
The A-123’s high-force linear motor can accelerate this nanopositioning stage at 3 g’s and achieve a maximum speed of 1 m/s, while its high-capacity, actively preloaded air bearings support smooth motion with minimal velocity fluctuations. The laterally opposed bearing design also allows flexible mounting orientations, and options include encoder configurations, air preparation kits, single- and multi-axis controllers, pneumatic locks, XY, XY-Theta and XYZ assemblies, cable-track variations, granite base plates, vibration-reduction systems, and custom configurations.
For manufacturers and research teams that need longer travel without sacrificing nanometer-class positioning performance, the A-123 provides the speed of a direct-drive stage with the smoothness and geometric performance of an air bearing guide. By eliminating mechanical contact, PI’s air bearing technology enables cleaner, smoother, and more durable precision motion than conventional mechanical bearing systems.
Controllers
PI’s A-800 series ACS-based motion controllers provide high-performance control for A-123 PIglide air bearing linear slides, combining EtherCAT® connectivity, advanced servo algorithms, precision encoder feedback, and coordinated multi-axis control. They are well suited for high-speed scanning, smooth velocity control, and demanding air-bearing motion applications.