Nanoimprint lithography - AZoNano Search

Supplier Profile

EV Group (EVG) is a leading supplier of high-volume production equipment and process solutions for the manufacture of semiconductors, MEMS, compound semiconductors, power devices and nanotechnology...

Automated Nanoimprint Lithography System - The EVG6200 Infinity from EV Group

Equipment

The EVG6200 Infinity automated nanoimprint lithography system is the culmination of EV Group's new aligner-technology roadmap. A variety of stamps and substrates sizes from 75mm-to-200mm can be...

Eulitha AG

Supplier Profile

Eulitha AG is a spin-off company of the Paul Scherrer Institute, Switzerland. It specializes in the development of lithographic technologies for applications in photonics, optoelectronics,...

UV-Nanoimprint Lithography - Overview and Systems Available for UV-Nanoimprint Lithography

Article - 17 Jan 2011

In UV-NIL, a substrate is spin coated or drop dispensed with a UV-curable monomer or oligomer. Imprinting is carried out with a transparent template (quartz glass or soft working stamps) and the...

Developing Nanoimprint Lithography (NIL) Processes with Expert Assistance

Article - 29 Nov 2016

We spoke to Markus Wimplinger, of the EV Group, about the new Nanoimprint Lithography NIL center, the NILPhotonics™ Competence Centre, that the EV Group have recently opened and how they can guide...

Nanoimprint Lithography Competence Center for Photonic Applications

Article - 14 Jan 2015

A new nanoimprint lithography competence center called the NILPhotonics™ Competence Center has been established by EV Group (EVG), a key provider of wafer bonding and lithography systems for...

The HERCULES®NIL Fully-Integrated UV Nanoimprint Lithography Track Solution from EV Group

Equipment

The HERCULES®NIL is designed with EVG’s proprietary SmartNIL imprinting technology with resist coating, cleaning and baking preprocessing steps and is the latest addition to EVG’s Nanoimprint...

EVG®7200 Automated UV Nanoimprint Lithography System

Equipment

EVG® 7200 nanoimprint system is an automated device incorporated with EVG's SmartNIL technology. The system facilitates the advanced soft stamp and manufacturing of nano-and microscale structures at a...

EVG®720 Automated UV Nanoimprint Lithography System

Equipment

EVG® 720 UV nanoimprint system is designed with an innovative SmartNIL technology which when combined with EVG's material expertise results in the mass production of micro- and nanoscale structures.

Automated Nanoimprint Lithography Stepper - The EVG770 NIL Stepper from EV Group

Equipment

EV Group's EVG770 Automated NIL Stepper is designed for step and repeat large area UV-Nanoimprint Lithography (UV-NIL) processes compatible for 100 mm up to 300 mm wafers.