PInano™ 1x3 XYZ & XY Piezo
Low-Cost, Nanopositioning Systems for Super-Resolution
Long Travel, Low
Profile, Optimized for Microscopy
Cost Effective Design, High
High-Stability Manual Microscope Stage as Basis for Piezo Stage
provided world class solutions for industry, OEM and research for several
(Physik Instrumente) L.P., is the U.S. operation of Physik
Instrumente (PI) GmbH & Co. KG. The PI family of
companies employs more than 350 people world wide. PI is known
throughout the high-tech world for its leadership in the design and manufacture
of Nanometer-Level Motion Control Products, Piezo
Ceramics and NanoActuators, Hexapod 6DOF
Positioning Systems and Micro Robots.
PInano™ 1x3 XYZ & XY Piezo Stage Systems
Low-Profile, Low-Cost, Nanopositioning Systems for
PInano™ series nanopositioning stages feature a very low
profile of 20 mm (0.8”), a large aperture for 1x3" slides and deliver highly
accurate motion with sub-nanometer resolution in up to 3 axes. Slide / petri
dish holders optional.
Some key aspects of the device are:
- Low Profile for Easy Integration: 20 mm (0.8“)
- Large Aperture for 1x3"Slides. Accessories & Holders Available
- All Parts Black Anodized for Minimum Reflections
- 200ìm Standard Travel Range, Longer Ranges Available
- Longest Lifetime with Proprietary PICMA® Piezo Technology
- Cost Effective due to Low-Cost Piezoresistive Sensors
- Compatible w/ Leading Image Acquisition Software Packages
- Closed-Loop Control for High Repeatability and Accuracy
- Millisecond Step Time, ideal for Super-Resolution Microscopy
- Recessed Sample Holders for Maximized Utility
Long Travel, Low Profile, Optimized for Microscopy
The new PInano™ XY and PInano™ XYZ
low-profile piezo scanning stages are optimized for easy integration into high
resolution microscopes. They feature a very low profile of 0.8“ (20 mm), a large
aperture, and long travel ranges of up to 200 x 200 x 200 ìm with subnanometer
closed-loop resolution – ideal for leading-edge microscopy and imaging
Longest lifetime is guaranteed by the integrated ceramicencapsulated PICMA®
piezo actuators. Due to the significantly higher humidity resistance, the
patented PICMA® design provides up to 10 times longer life than conventional
Cost Effective Design, High Performance
PInano™ series piezo positioning stages are designed to
provide high performance at minimum cost. For highly stable, closed loop
operation, piezoresistive sensors are applied directly to the moving structure
and precisely measure the displacement of the stage platform. The very high
sensitivity of these sensors provides optimum position stability and
responsiveness as well as sub-nanometer resolution. A proprietary servo
controller significantly improves the motion linearity compared to conventional
piezoresistive sensor controllers.
Working Principle / Reliability
Flexures optimized with Finite Element Analysis (FEA) are employed to guide
the PInano™ series stages. FEA techniques give the design the
highest possible stiffness in, and perpendicular to, the direction of motion,
and to minimize linear and angular runout. Flexures allow extremely
high-precision motion, no matter how minute, as they are completely free of play
and friction. The award-winning PICMA® piezo drives are more robust than
conventional piezo actuators, featuring superior lifetime and performance in
both dynamic and static applications. Because guidance, actuators and sensors
are all maintenance-free, these nanopositioning systems achieve outstanding
levels of reliability.
Background: The piezo controller is included and comes with a
24-bit resolution USB port as well as ethernet, RS-232 and an analog
Foreground: The optional M-545
manual XY stage provides a stable platform for the the PInano™
piezo stage. R2 piezo stage versions (60x60 mm aperture) shown.
||X, Y, Z
|Motion and positioning|
||200 x 200
||200 x 200 x 200
|Push/pull force capacity in motion direction
||100 / 30
||100 / 30
|Electrical capacitance per axis
||6 (X, Y), 12 (Z)
|Recommended operating temperature range
||20 to 30
||20 to 30
|Sensor / voltage connection
*Resolution of PI Piezo
Nanopositioners is not limited by friction or stiction. Value given is noise
equivalent motion measured with interferometer.
The P- 545 piezo stage can be mounted on the optional M-545
manual XY stage. This high-stability stage is recommended as a basis for the
piezo stage, especially when the highest step-and settle performance is
required. It is available for Olympus, Nikon, Zeiss and Leica microscopes and
can also be upgraded with motorized micrometers.
Stages have two mounting surfaces. The primary surface is on the top of the
stage and protrudes from 0.5 mm from the body of the stage.
A secondary mounting surface is provided on the bottom of the stage. This
surface allows mounting closer to the bottom surface of the stage body which can
be useful in some applications, such as microscopy.
The planar dimensions and mounting hole pattern are identical.
Optional High-Stability Manual Microscope Stage as Basis for
designed the P-545 stage to be easily integrated to commercial microscopes
through the use of the M-545 stage. M-545
stages are available for Nikon, Olympus, Zeiss and Leica inverted microscopes.
These stages mount directly to the microscope base and accept the P-545.3R and
P-545.2R as well as several other PI stages.
The M-545 stages can be manually driven through micrometers or
using PI’s precision motorized actuators. Contact your PI sales
representative for details.
When used in a microscope application, the focal plane for the microscope is
located near the bottom of the stage. It is for this reason that the stage has a
lower mounting surface. The figure below shows the nominal location of the focal
plane. Vertical travel of the objective varies based on the microscope used.
A series of accessories is available from PI to assist
with mounting a sample holder to the stage. The P-545.SH1 is available to hold
standard 1”x 3” (25mm x 75mm) microscope slides and the P-545.PD1 is offered for
holding 35mm Petri Dishes.
Source: Physik Instrumente
For more information on this source please visit Physik