Topics Covered
The ATLAS™ from Carl Zeiss
What is The ATLAS™?
Benefits of Using The ATLAS™
Maximum Beam Energy in FE-SEM
Setting Up and Running Typical ATLAS™ Jobs
Multiple Sites within a Single Grid
Integrated Viewer Software
Summary
Acknowledgments
The ATLAS™ from Carl Zeiss
Carl
Zeiss has recently developed a novel approach: “ATLAS™” – a
module for AuTomated Large Area Scanning to address the challenge of acquiring a
large number of high quality serial images at high speed. ATLAS™
combines the scanning transmission electron microscope (STEM) imaging mode (or
actually any other detection scheme) of a field emission
scanning electron microscope (FE-SEM) with an extremely large digital scan
generator and image acquisition system with up to 32 k × 32 k pixels.
The combination of FE-SEM based STEM imaging with ATLAS™, a
large specimen chamber, stage movement, multiple grid sample holders and the
highly automated features available on the Carl Zeiss
FE-SEM
is a very compelling alternative to conventional TEM imaging. Given suitable
samples, unattended operation can be performed over a period of days. The
corresponding application procedure will be introduced and presented here.
What is The ATLAS™?
The ATLAS™ is an arbitrary scan generator and digital image
acquisition system capable of single image storage up to 32 k × 32 k pixels. ATLAS™
provides precise control of beam deflection, dwell time (100 ns increments) as
well as higher level filtering and binning algorithms. There is complete control
of overall mosaic width, height, pixel size, tile resolution and tile overlap
within the ATLAS™ software.
Additionally, ATLAS™ offers control of FE-SEM auto
functions such as autofocus, brightness & contrast, beam stigmation and scan
rotation memory to ensure nanometer resolution and high image quality over
millimeter scales. There are additional functions for real time interrogation of
the images, for repeat of specific tiles and even an e-mail server for progress
updates to the remote user.
Figure 1 shows the multi sample carousel holder which can be expanded into a
12-sample holder (top), the picture of TEM grid (middle) and a formvar coated
slot grid with 17 serial ultra sections (bottom). The very low magnification
projection of DF and BF detectors underneath the sample is visible as a dark
cross-shape and a central bright circle respectively from the right image.
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Figure 1. The images of a multi sample carousel holder, a
TEM grid carousel holder and a formvar slot grid with17 serial ultra
sections.
Benefits of Using The ATLAS™
The FE-SEM features a digital scan generator and a pixel-by- pixel
image acquisition system in contrast to the CCD or the film camera in the TEM.
One benefit of using the FE-SEM is that modern digital acquisition systems can provide
extremely large and – in the case of the ATLAS™ –
giga-pixel frame store sizes in a single image.
A typical large-format CCD camera for a TEM only provides 2 k x 2 k, frame
store sizes with larger formats are only available at drastically increased
cost.
The much larger, high quality digital scanned images obtained from the FE-SEM
translate to more efficient tiling for covering very large areas. However,
tiling may not be necessary with single images providing a field of view of 60
to 100 microns at 2 or 3 nm pixel resolution.
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Figure 2. The unique arrangement of both brightfield (BF)
and darkfield (DF) diodes in the ZEISS Multi-Mode STEM detector. BF and DF
electrons can be collected simultaneously and processed together. BF inverted DF
is a typical configuration for large fields of view in excess of 100 microns
with even illumination.
Resolution in STEM mode can be as high as 0.6 nm with FE-SEM
approaching that of the TEM and STEM image quality may actually exceed that of
TEM in some aspects (e.g. contrast). A few examples show image quality easily
attainable with the FE-SEM in STEM mode in the following.
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Figure 3. The STEM image of 10 nm immunogold labeled rat
hypothalamus in Lowicryl HM20 epoxy, no post stain.
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Figure 4. The STEM image of a myelinated axon sheath in
unstained rat hippocampus ultra section with 3 nm spacing.
Maximum Beam Energy in FE-SEM
Imaging of ultramicrotome cross sections with the STEM detector in an FE-SEM is
very similar to the image recording in a TEM as both unscattered electrons (brightfield
model) and scattered electrons (darkfield model) can be collected. However,
resolution in the FE-SEM is
limited only by beam size. The absence of a lens beneath the sample in the FE-SEM eliminates
spherical aberrations induced by the scattering angle and chromic aberrations
due to energy loss. In the FE-SEM the
maximum beam energy is limited typically to 30 kV and there is no need for a
CCD or a film camera.
The maximum beam energy of the FE-SEM
limits the maximum beam penetration depth which depends on material composition
mainly. Heavy metal stained materials like biological samples are ideal
candidates for low voltage STEM in the FE-SEM.
Setting Up and Running Typical ATLAS™ Jobs
A typical ATLAS™ job can be set up within a few hours and then run
unattended over a period of days. The mosaic option panel allows definition of
the mosaic parameters and auto functions. As shown in Figure 5, the mosaic
dimension, single tile pixel size, single tile resolution, dwell time and
overlapping area size etc., can be chosen in the initial set-up procedure
according to the requirements of the job to be performed. In general, the
application procedure of the ATLAS™ is
as follows:
- Load the sample into the FE-SEM.
Choose “Create a mosaic” from the ATLAS™ user
interface followed by the set-up of “Mosaic Batch Processing” including “Stage
Location”, “Mosaic Parameters” and “Auto Functions” etc.
- After defining the mosaic job parameters according to the requirements, the
image acquisition will automatically start by simply clicking “Execute”.
- The generated image tiles with high pixel resolution can be handled and
stitched by the integrated viewer software.
- The stitched mosaic can be viewed and navigated, output and saved by the
viewer with the required resolution.
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Figure 5. The mosaic option panel shows the arbitrary
parameter setting and auto functions.
Figure 6 shows a typical single site 6 × 2 mosaic covering one 250 micron
wide ultra section. Each of the 12 tiles has a 48-micron field of view, and a
single 24 k × 24 k pixel image displays 2 nm pixel resolution.
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Figure 6. The 6 × 2 mosaic image of ultramicrotome cross
section of rat hippocampus recorded with STEM detector.
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Figure 7. Rat hippocampus zoom images from a single tile
of 24 k × 24 k pixels.
The high pixel density of the single tile can be visualized by continuous
zoom-in. A simulated zoom from a single 24 k × 24 k pixels tile illustrates the
extreme field of view pixel density capability as shown in Figure 7. For
example, here the single tile acquisition time is about 19 minutes and the whole
job only takes 3.8 hours. With a 10 megapixel TEM camera, it would take more
than 300 images to cover this area at an equivalent pixel resolution, also
leading to a correspondingly much greater workload in post-image processing.
Multiple Sites within a Single Grid
It is possible to do multiple sites within a single grid and repeat the
process at multiple sites on multiple grids with the 12-carousel holder shown in
Figure 8. Site selection is done manually and performed by the operator prior to
an automated run. Simple scan rotation memory at each site ensures alignment of
serial sections within a grid as well as grid to grid.
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Figure 8. The configuration of the multi carousel holder
with 12 grids inside the stage navigation of “Smart SEM®”.
Integrated Viewer Software
Once the automated job is finished, the generated image tiles can be viewed
and stitched together by the integrated Viewer software to obtain a panoramic
image of a large area. The Viewer allows the user to efficiently open, stitch,
navigate, output/save and intelligently re-render the large two dimensional
datasets produced by ATLAS™.
Summary
FE-SEM based STEM imaging in combination with ATLAS™ is a
new high resolution, high throughput imaging technique for tissue samples and
provides an alternative to traditional TEM imaging of biological samples. You
are no longer limited to only imaging a small area of the sample in high
resolution. Here FE-SEM-based STEM in combination with ATLAS™ is a
superior solution to large volume image acquisition.
Acknowledgments
We appreciate Dr. Doug Wei and his team for their pioneering ideas and full
support in the ATLAS™ development.
John Mendenhall, Center for Learning and Memory, University of Texas at
Austin is gratefully acknowledged for providing the samples and significant
discussion.
Source: "Automated Extreme Field of View Low Voltage Multi-Mode
STEM Imaging of Biological Ultramicrotome Cross Sections with ATLAS™" by Carl
Zeiss

For more information on this source, please visit Carl
Zeiss.