The newly designed stages of the series nanoSXY combine the high accuracy
and the high speed of piezo positioning system with the a special actuating
design for long travel motion. Further more the height of the stage is 20mm
only with a free center space of 12.5mm! Outside dimensions are only 60x60mm.
Especially the ultra flat design of the stage and the easy way to combine
the stage to an xy scanning system makes the system open for a wide variety
of applications Based on the unique piezojena bi-directional actuating nanoX
design, these series is designed to move high load masses with a resolution
of 0.6nm.
The nanoX design also guarantees excellent guidance accuracy without parasitic
motion and improves the settling time in an active manner.
The stages can be equipped with a high resolution feed back system for closed
loop control.
Features
- 400µmrange of motion in xy
- high z-axes stiffness for high load capability
- excellent guidance accuracy
- 12.5mm free clearance aperture
- short settling time
Applications
- high precision positioning
- materials research
- microscopy
- semiconductor test equipment