Axcelis Technologies, Inc.
(Nasdaq:ACLS) has announced today that Semiconductor Manufacturing International
Corporation (SMIC), a leading foundry based in China, has made its single wafer
Optima HD(tm) high dose implant system process tool of record for advanced logic
production. The Optima HD addresses both traditional high dose implants as well
as an expanding range of applications, including molecular and hydrogen implants.
"We're very pleased that the addition of the Optima HD high dose implanter
further strengthens our relationship with SMIC," said Mary Puma, chairman
and CEO of Axcelis. "The Optima HD has demonstrated its exceptional process
capabilities as well as met the exacting demands of advanced foundry process
flows."
The Optima HD covers all traditional and emerging high dose applications providing
significant throughput advantages. The Optima HD delivers precise, repeatable
implants using Axcelis' advanced spot beam technology. In addition, the Optima
HD's proprietary RadiusScan(tm) endstation enables the system to cover an extremely
broad dose range for optimized flexibility.
Axcelis Technologies, Inc. (Nasdaq:ACLS) headquartered in Beverly, Massachusetts,
provides innovative, high-productivity solutions for the semiconductor industry.
Axcelis is dedicated to developing enabling process applications through the
design, manufacture and complete life support of ion implantation and cleaning
systems.
Posted July 22nd, 2009
