AIXTRON AG announced
the receipt of a purchase order for a 6" Black Magic Plasma Enhanced CVD
(PECVD) system for graphene and carbon nanotube (CNT) growth from the University
of California, Santa Barbara (UCSB), USA, in the third quarter 2009.
This combined thermal CVD and plasma enhanced CVD tool is planned to be delivered
in first quarter 2010 to Professor Kaustav Banerjee, who directs the Nanoelectronics
Research Lab at UCSB.
AIXTRON's PECVD system uses unique rapid heating and plasma technologies
which have been proven in the field since 2005, and has enabled customers to
produce various types of nanotubes, including low temperature, multiwall, singlewall
and supergrowth nanotubes.
The Nanoelectronics Research Lab at UCSB is a world-class facility conducting
research into emerging issues in nanoscale CMOS as well as the modeling, design,
and fabrication of nanomaterials (carbon nanotube, graphene, nanowire, etc.)
for next-generation electronics and energy harvesting/storage applications.
Further information on the Nanoelectronics Research Lab at UC Santa Barbara
can be found at: http://nrl.ece.ucsb.edu/
Posted February 9th, 2010
