Research and Markets, leading source for international market research and
market data, has announced the addition of John Wiley and Sons Ltd's new book
"Reliability
of MEMS" to their offering.
This first book to cover exclusively and in detail the principles, tools and
methods for determining the reliability of microelectromechanical materials,
components and devices covers both component materials as well as entire MEMS
devices. Divided into two major parts, following a general introductory chapter
to reliability issues, the first part looks at the mechanical properties of
the materials used in MEMS, explaining in detail the necessary measuring technologies
-- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part
Two treats the actual devices, organized by important device categories such
as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.
Osamu Tabata received his Ph.D. degree from Nagoya Institute of Technology,
Japan, in 1993. From 1981 to 1996, he performed industrial research at Toyota
Central Research and Development Laboratories in Aichi, Japan. He then joined
the Department of Mechanical Engineering of Ritsumeikan University in Shiga,
Japan, and spent Guest Professorships at IMTEK Freiburg, Germany, and at ETH
Zurich, Switzerland. In 2003, he joined the Kyoto University, Japan. Currently,
he is the Professor at Micro Engineering Department. Professor Tabata is engaged
in the research of micro/nano processes, MEMS and micro/nano system synthetic
engineering (SENS). He was honored with the Science News Award in 1987, Presentation
Paper Award in 1992, and received the R&D 100 Award in 1993 and 1998, Best
Poster Award of 19th Sensor Symposium on Sensors, Micromachines, and Applied
Systems in 2002, Best Patent Award from Ritsumeikan University in 2004. He is
a senior member of the Institute of Electrical Engineers of Japan, a member
of the Japan Society of Mechanical Engineers and a senior member of the Institute
of Electrical and Electronics Engineers.
Toshiyuki Tsuchiya received his Ph.D. degree from Nagoya University, Japan,
in 2002. From 1993 to 2004, he carried out industrial research at Toyota Central
Research and Development Laboratories in Aichi, Japan. In 2004, he joined the
Department of Mechanical Engineering of Kyoto University and is currently Associate
Professor in the Department of Microengineering. Toshiyuki Tsuchiya's current
research is focused on mechanical properties evaluation of micro/nano materials
and MEMS and micro/nano system synthetic engineering (SENS). He received the
R&D 100 Award in 1998.