Leaders in etch, deposition and growth systems and processes, Oxford
Instruments Plasma Technology, will shortly be shipping an Ionfab500 ion
beam system to a key customer in Asia.
Designed for ultra high quality optical thin films, the Ionfab500Plus was launched
in 1983 and was the world’s first commercial ion beam sputter deposition
system for ring laser gyroscope manufacture. In recent years customers have
demonstrated mirrors exhibiting < 20ppm on a commercially available system
using the Ionfab500Plus.
Comments Mark Vosloo, Oxford Instruments Plasma Technology’s Sales Director,
“The Ionfab500Plus Ion Beam Deposition System has been developed for customers
demanding high throughput. This is delivered by the use of the 4 x 10”
planetary substrates and the ability to use 14” targets. Another key benefit
to customers requiring high throughput is the use of up to 3 targets, meaning
that different material layers may be deposited without breaking vacuum.”
Based in the UK, with offices worldwide, Oxford Instruments works closely with
their customers to develop new and customised processes according to their application
needs, and tailors equipment for their precise application.