AIXTRON AG , a leading
provider of deposition equipment to the semiconductor industry, today announced
an order from ETH Zurich for a Black Magic Plasma Enhanced CVD system to be
installed at the Nanotechnology Center in Ruschlikon, Switzerland. The Nanotechnology
Center is a unique, public private partnership between IBM Research and ETH
Zurich. The new system, used for single wall carbon nanotube deposition, is
6-inch in configuration and will be commissioned by the local AIXTRON support
team in the first quarter of 2011.
Dr. Christofer Hierold, Professor of Micro and Nanosystems, Department of Mechanical
and Process Engineering at ETH Zurich, comments, “We have been looking
for a system that is flexible enough to fulfill the requirements of a multi-user
lab serving both ETH and IBM. AIXTRON’s Black Magic system fulfills this
requirement and will fit to our needs when we kick off advanced carbon nanomaterial
research at the Nanotechnology Center.”
AIXTRON’s Black Magic systems use unique rapid heating and plasma technologies
which have been field-proven since 2005. They have enabled many leading research
institutions all over the world to produce carbon nanotubes and graphene.
The Nanotechnology Center is a dedicated new research facility with purpose-built
clean rooms and "noise-free" labs shielded against external vibrations,
acoustic noise, electromagnetic fields and temperature fluctuations. The purpose
of the new laboratory is to push the frontiers of research into new semiconductor
materials and devices.