AIXTRON Receives Order for Black Magic Plasma Enhanced CVD System from Nanotechnology Center

Published on October 5, 2010 at 3:39 AM

AIXTRON AG , a leading provider of deposition equipment to the semiconductor industry, today announced an order from ETH Zurich for a Black Magic Plasma Enhanced CVD system to be installed at the Nanotechnology Center in Ruschlikon, Switzerland. The Nanotechnology Center is a unique, public private partnership between IBM Research and ETH Zurich. The new system, used for single wall carbon nanotube deposition, is 6-inch in configuration and will be commissioned by the local AIXTRON support team in the first quarter of 2011.

Dr. Christofer Hierold, Professor of Micro and Nanosystems, Department of Mechanical and Process Engineering at ETH Zurich, comments, “We have been looking for a system that is flexible enough to fulfill the requirements of a multi-user lab serving both ETH and IBM. AIXTRON’s Black Magic system fulfills this requirement and will fit to our needs when we kick off advanced carbon nanomaterial research at the Nanotechnology Center.”

AIXTRON’s Black Magic systems use unique rapid heating and plasma technologies which have been field-proven since 2005. They have enabled many leading research institutions all over the world to produce carbon nanotubes and graphene.

The Nanotechnology Center is a dedicated new research facility with purpose-built clean rooms and "noise-free" labs shielded against external vibrations, acoustic noise, electromagnetic fields and temperature fluctuations. The purpose of the new laboratory is to push the frontiers of research into new semiconductor materials and devices.

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