Tegal Corporation, (Nasdaq:
TGAL) an innovator of specialized production solutions for the fabrication
of advanced MEMS, power ICs and optoelectronic devices, today announced it has
received orders for a Tegal 110 DE/SE DRIE tool and for a TEGAL SMT AlN PVD
system from two prominent research centers currently equipping state-of-the-art
laboratory facilities. The DRIE tool will ship to a customer in South East Asia,
who will use the tool for research in microsystems, microfluidics, and MEMS
sensor applications, while the AlN PVD system will ship to a North American
customer for research activities in the RF MEMS and piezoelectric sensor and
In both instances, the orders from these first-time Tegal customers were secured
following a competitive bidding process.
The Tegal 110 DE/SE system is a high-density plasma etch tool featuring an
inductively coupled plasma etch reactor and magnetic plasma confinement. The
tool can run Tegal’s patented SHARP – Super High Aspect Ratio Process,
achieving etched feature aspect ratios of > 100:1 in production environments.
Together with its high reliability, broad process windows, and high etch rates,
the Tegal 110 DE/SE system is a critical enabler for etching silicon (SE) and
dielectric (DE) films found in the MEMS/MOEMS, bio-tech, and hi-voltage markets.
Tegal 110 DRIE tools are presently employed in numerous research and development
laboratories throughout the world, engaging in both commercial and academic
The Tegal SMT PVD system is a single module PVD tool optimized for high quality
reactive sputtering of piezoelectric aluminum nitride (AlN) films for electro
acoustic devices such as BAW and FBAR filters (RF MEMS) and for other piezoelectric
sensor and actuator applications. The system features a unique implementation
of the Tegal dual cathode S-Gun™ magnetron source specifically optimized
for the most demanding film thickness uniformity, stress, and crystal orientation
specifications in the PVD industry. Along with providing AlN PVD equipment under
the Tegal SMT and Tegal Endeavor product families, Tegal has been supporting
the AlN community by offering high quality AlN foundry services in its San Jose,
CA PVD Demonstration Laboratory.