Nanometrics Incorporated
(Nasdaq:NANO), a leading supplier of advanced process control metrology
systems used primarily in the manufacturing of semiconductors, solar photovoltaics
and high-brightness LEDs, today announced orders for one VerteXTM and multiple
RPMBlueTM photoluminescence (PL) mapping metrology systems. The VerteX system
is expected to be qualified into a new HB-LED development line, and the RPMBlue
systems are expected to be qualified into the high-volume manufacturing line
of a different customer. All systems are expected to be qualified in the third
quarter of this year.
“Our customers are leveraging the increased capability of the VerteX
system to address challenges in the rapidly-growing HB-LED market. New end-device
deployments in area lighting, LCD back-lighting and an increased understanding
of the performance and cost-of-ownership benefits of high-brightness LEDs are
driving HB-LED development,” commented Tom Ryan, Director of the Materials
Characterization Business Unit at Nanometrics. “Our PL mapping products
are well-positioned to support increased development and rapid production ramps
as new high-brightness LED manufacturing technologies come online.”
The VerteX PL mapping system provides a combination of metrology technologies
to support both process development and production control. The VerteX is capable
of supporting epitaxial layer metrology on many substrate types and sizes and,
due to the illumination system options, can cover the entire spectrum of LED
technologies from UV-LEDs through the visible colors to infra-red. Nanometrics’
newest product for HB-LED process control is the RPMBlue. This is targeted at
production control of Gallium Nitride (GaN)-based blue HB-LEDs that are increasingly
used in LCD back-lighting. The system has been optimized for industry-leading
throughput of up to 80 two-inch GaN wafers per hour. Because of the available
features and performance, Nanometrics believes its PL mapping systems are used
by over 90% of the top-tier HB-LED manufacturers in development and production.