As a leader in systems and processes for etch, deposition and growth, Oxford Instruments Plasma Technology (OIPT) is continuously designing upgrades for its systems, processes and software as new techniques are developed. In this way the company can offer greater efficiencies and cost savings to its customers.
The Liquid Nitrogen (LN2) Auto Changeover Unit (ACU) is one such cost and time saving development, enabling table cooling fluid to be automatically switched between LN2 and Chiller Fluid, via a recirculating chiller. Impressive time savings mean that when using the ACU, cool down time from 200ºC to 20ºC is cut to 40 minutes (including switching from Cryo to Chiller mode) compared to the natural cool down time of 10 to 12 hours.
OIPT's Liquid Nitrogen (LN2) ACU gives accelerated cooling in temperature range 200 °C to 0 °C, and saves time when rapid mode change is required. The Unmanned/Overnight mode change gives time for the table temperature to stabilise, ready for process at the beginning of the next day. With a setpoint range of between -150ºC to +400ºC and more efficient use of LN2, this fully automated upgrade will save users time and money.
All new or existing Oxford Instruments' systems with a Cryo Table or RIE heated electrode are compatible with the LN2 Auto Changeover Unit.