By Cameron Chai
AIXTRON recently received an order from the National Institute of Advanced Industrial Science and Technology (AIST) in Japan for an automated 300mm Black Magic system to be used for Graphene deposition. The graphene properties make it suitable for microelectronics and high frequency applications.
The order was placed in the first quarter of 2011, and delivery will take place in the third quarter of 2011 for installation in the AIST Super Clean Room at Tsukuba. It will be made operational by the local AIXTRON team. The system complied with stringent requirements stipulated by the Synthesis and Transfer Application of Graphene at the Collaborative Research Team Green Nanoelectronics Center (GNC). It will help develop and application of Nanocarbon materials.
According to Dr. Ken Teo, director of Nanoinstruments at AIXTRON, the system displays uniform temperature and a gas delivery system that offers an accurate forerunner. It includes the ARGUS in-situ thermal mapping system. An automated handler and multi-wafer loadlock are incorporated for delivering high throughput.
GNC is being supported by the Funding Program for World-Leading Innovative R&D on Science and Technology (FIRST) Program that fosters research and development to steer Japan’s global presence in social welfare.