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Nordson ASYMTEK Introduce New Workcell for Film-Frame Wafer Dispensing

Nordson ASYMTEK, a leader in dispensing, coating, and jetting technologies, introduces its new automated workcell for film-frame wafer-level packaging applications. The workcell is ideal for customers who want to buy their dispensing and handling equipment from a single vendor and are looking for a lower cost-of-ownership than traditional wafer handling solutions.

Nordson ASYMTEK's new workcell - MH-910W same-side loader/unloader integrated with the Spectrum S-920N dispenser - is designed for 150-mm film-frame wafer processing and flexible enough to support various sizes. Applications include MEMs/image sensor capping, wafer coating for imaging devices such as digital light processing (DLP), life sciences for biochip reagent jet dispensing, and jetting of thin coatings prior to laser dicing to reduce contamination or dust caused by ablation fall-out from the dicing process.

"Our customer requirements drive equipment design," explained Chris Marion, business unit director for Nordson ASYMTEK. "Our new wafer-level workcell meets the need for higher throughput and lower cost-of-ownership relative to other wafer handling systems. We've simplified our customers' wafer-level dispensing process by integrating the dispensing and handling operation into a single workcell."

Advanced process controls are built into the film-frame wafer workcell to ensure a smooth, error-free transport and dispense operation. Both the MH-910W film-frame loader/unloader and S-920N dispensing system are fully enclosed with interlocked doors and windows for operator safety and part security. Access panels are easily removed and built-in software maintenance tools make servicing easy.

The MH-910W same-side loader/unloader provides programmable transport speed to maximize units per hour while multiple sensors and active pinch wheels ensure safe handling. Film-frame wafers are pulled from one cassette and returned to a second cassette after dispense. A frame sensor identifies the next available wafer, significantly reducing search time for partially filled cassettes. During loading, film-frame wafers are carefully pulled from the cassette and through the system by a soft-touch gripper and active pinch wheels. Sensors also ensure cassette slots are empty before returning processed wafers to the second cassette.

The workcell has a small footprint, approximately 1225 x 1321mm, and meets SEMI-S2, SEMI-S8, SMEMA, and CE standards and certifications.

The new workcell will be on display at the Nordson ASYMTEK booth #6071 at SEMICON West, July 12-14, Moscone Center, San Francisco, CA. Nordson ASYMTEK engineers will be available to discuss your applications.

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