Horiba Jobin Yvon has extended the
performance capability of the UVISEL spectroscopic phase modulated
ellipsometer with the integration of the VIP DUV Spectroscopic
reflectometer. The combination of high precision ellipsometer and
reflectometer measuring at the same sample position allows
characterisation of features as small as 10 microns.
UVISEL spectroscopic phase modulated ellipsometer integrated with the VIP DUV Spectroscopic reflectometer
Applications of the UVISEL VIP include measurement of film
thickness, refractive index and reflectivity of thin films and
multilayer stacks with very high accuracy.
By the addition of a large area mapping stages of dimension
200mm, 300mm and above, and with integrated pattern recognition
software the UVISEL VIP is able to characterise patterned materials
found in semiconductor wafers, display materials, OLED structures and
biosensors with thicknesses ranging from a few angstroms to several
tens of microns.
The well proven DeltaPsi2 software package controls the
complete instrument, and provides a simple interface for production,
pilot plant and research applications.